Plasma processing apparatus and plasma processing method
View Patent ↗A plasma processing apparatus or a plasma processing method that processes a wafer to be processed, which is placed on a surface of a sample stage arranged in a processing chamber inside a vacuum container, using a plasma formed in the processing chamber, the apparatus or method including processing the wafer by adjusting a first high-frequency power to be supplied to a first electrode arranged inside the sample stage and a second high-frequency power to be supplied, via a resonant circuit, to a second electrode which is arranged in an inner side of a ring-shaped member made of a dielectric arranged on an outer peripheral side of a surface of the sample stage on which the wafer is placed, during the processing.
1. A plasma processing method that processes a wafer, which is placed on a surface of a sample stage arranged in a processing chamber inside a vacuum container, using a plasma formed in the processing chamber, the method comprising:
processing the wafer by adjusting a first high-frequency power to be supplied to a first electrode arranged inside the sample stage and a second high-frequency power to be supplied, via a resonant circuit, to a second electrode which is arranged in an inner side of a ring-shaped member made of a dielectric arranged on an outer peripheral side of a surface of the sample stage on which the wafer is placed during the processing,
wherein the second high-frequency power to be supplied to the second electrode via the resonant circuit to which a coil and a capacitor are arranged in series is adjusted in the processing.
2. The plasma processing method according to claim 1 , wherein
an inductance of the coil is adjusted to adjust the second high-frequency power to be supplied to the second electrode in the processing.
3. The plasma processing method according to claim 1 , wherein
an inductance of the coil is adjusted using a result of voltage detected in a location between the coil and the second electrode on a power supply path to supply the second high-frequency power to the second electrode to adjust the second high-frequency power to be supplied to the second electrode in the processing.
4. The plasma processing method according to claim 1 , wherein
a voltage of a location between the coil and the second electrode on a power supply path to supply the second high-frequency power to the second electrode, and a voltage of a location between the coil and a matching device arranged on the power supply path are detected, and an inductance of the coil is adjusted such that a ratio between the voltages is set to be a value in a predetermined tolerance range to adjust the second high-frequency power to be supplied to the second electrode in the processing.