Memory structures having improved write endurance
A memory structure can include a memory cell and a first barrier layer having a maximum hydrogen diffusion coefficient of 1×10 −17 cm 2 /s, said first barrier layer adjacent to the memory cell to minimize contaminant movement to or from the memory cell.
1. A memory structure, comprising:
a memory cell;
a first passivation layer adjacent the memory cell;
a second passivation layer adjacent the memory cell; and
a first barrier layer between the first passivation layer and the second passivation layer, and a second barrier layer adjacent the memory cell, said first and second barrier layers comprising a metal nitride, a metal oxide, a metal carbide, or a combination thereof; and
a tetraethyl orthosilicate (TEOS) layer between the second passivation layer and the memory cell.
2. The memory structure of claim 1 , wherein the memory cell includes a chalcogenide memory material.
3. The memory structure of claim 2 , wherein the chalcogenide memory material comprises germanium, antimony, tellurium, silicon, nickel, gallium, arsenic, silver, tin, gold, lead, bismuth, indium, selenium, oxygen, sulphur, nitrogen, carbon, or a combination thereof.
4. The memory structure of claim 1 , wherein the first passivation layer is a polyimide passivation layer, or the second passivation layer is an oxynitride passivation layer.
5. The memory structure of claim 1 , wherein the first barrier layer comprises silicon nitride, aluminum oxide, hafnium oxide, zirconium oxide, niobium oxide, titanium oxide, silicon carbide, or a combination thereof.
6. The memory structure of claim 1 , wherein the second barrier layer is positioned between the second passivation layer and the memory cell.
7. The memory structure of claim 1 , wherein the memory cell is positioned between the second barrier layer and the second passivation layer.
8. The memory structure of claim 1 , wherein the second barrier layer is positioned between the second passivation layer and the TEOS layer.
9. The memory structure of claim 8 , further comprising a third barrier layer adjacent the memory cell, said third barrier layer comprising a metal nitride, a metal oxide, a metal carbide, or a combination thereof.
10. The memory structure of claim 9 , wherein the third barrier layer is positioned between the TEOS layer and the memory cell.
11. The memory structure of claim 10 , further comprising a fourth barrier layer positioned on a side of the memory cell opposite the third barrier layer, said fourth barrier layer comprising a metal nitride, a metal oxide, a metal carbide, or a combination thereof.
12. The memory structure of claim 9 , wherein third barrier layer is positioned on a side of the memory cell opposite the second barrier layer.
13. The memory structure of claim 1 , wherein the second barrier layer is positioned between the TEOS layer and the memory cell.
14. The memory structure of claim 13 , further comprising a third barrier layer positioned on a side of the memory cell opposite the second barrier layer, said third barrier layer comprising a metal nitride, a metal oxide, a metal carbide, or a combination thereof.
15. The memory structure of claim 1 , wherein the first barrier layer has a thickness of from about 10 nanometer (nm) to about 300 nm.
16. A memory structure, comprising:
a memory cell; and
a first barrier layer having a maximum hydrogen diffusion coefficient of 1×10 −17 cm 2 /s, said first barrier layer adjacent to the memory cell to minimize contaminant movement to or from the memory cell.
17. The memory structure of claim 16 , wherein the first barrier layer is positioned between a first passivation layer and the memory cell.
18. The memory structure of claim 17 , wherein the first barrier layer is positioned between the first passivation layer and a tetraethyl orthosilicate (TEOS) layer.
19. The memory structure of claim 18 , further comprising a second barrier layer having a maximum hydrogen diffusion coefficient of 1×10 −17 cm 2 /s, said second barrier layer being positioned between the TEOS layer and the memory cell.
20. The memory structure of claim 19 , wherein the TEOS layer is on the memory cell or memory cell is on the TEOS layer.
21. The memory structure of claim 17 , wherein the first barrier layer is positioned between the first passivation layer and a second passivation layer.
22. The memory structure of claim 21 , further comprising a second barrier layer having a maximum hydrogen diffusion coefficient of 1×10 −17 cm 2 /s, said second barrier layer being positioned between the first barrier layer and the memory cell.
23. The memory structure of claim 22 , wherein the second barrier layer is positioned between the second passivation layer and a TEOS layer, or between a TEOS layer and the memory cell.
24. The memory structure of claim 23 , further comprising a third barrier layer having a maximum hydrogen diffusion coefficient of 1×10 −17 cm 2 /s, said third barrier layer being positioned between the TEOS layer and the memory cell.
25. The memory structure of claim 24 , further comprising a third barrier layer having a maximum hydrogen diffusion coefficient of 1×10 −17 cm 2 /s, wherein the memory cell is positioned on the third barrier layer.
26. The memory structure of claim 16 , wherein the memory cell is positioned on the first barrier layer.
27. The memory structure of claim 26 , wherein the first barrier layer is positioned between the memory cell and a TEOS layer.