Vertical transistors with buried metal silicide bottom contact
A method of fabricating the vertical field effect transistor includes forming a dielectric layer on a metal semiconductor alloy layer that is present on a substrate of a semiconductor material. The dielectric layer is bonded to a supporting substrate. The substrate of the semiconductor material is cleaved, wherein a remaining portion of the semiconductor material provides a semiconductor surface layer in direct contact with the metal semiconductor alloy layer. A vertical fin type field effect transistor (FinFET) is formed atop the stack of the semiconductor surface layer, the metal semiconductor alloy layer, the dielectric layer and the supporting substrate, wherein the semiconductor surface layer provides at least one of a source region or a drain region of the FinFET and the metal semiconductor alloy provides a contact to the source region or the drain region of the FinFET.
1. A method of forming a semiconductor device comprising:
forming a material stack including a semiconductor surface layer in direct contact with a metal semiconductor alloy layer, wherein the metal semiconductor alloy layer is on a dielectric layer; and
forming a vertical fin type field effect transistor (FinFET) atop the material stack, wherein the semiconductor surface layer provides a first source/drain region of the vertical FinFET and the metal semiconductor alloy layer provides a contact to the first source/drain region.
wherein the semiconductor surface layer has a first portion that extends continuously across an entirety of a width of the vertical FinFET and a second portion that has a pedestal geometry for supporting a fin of the vertical FinFET that does not extend the entirety of the width of the vertical FinFET,
wherein the forming the vertical FinFET includes forming a vertically orientated channel of the vertical FinFET having a first end in direct contact with the semiconductor surface layer, forming a second source/drain region on a second end of the vertically oriented channel, and forming a gate structure at a side of the vertically oriented channel, the gate structure including a metal layer, and
wherein a lower surface of the second source/drain region extends laterally over the metal layer of the gate structure.
2. The method of claim 1 , wherein the forming the material stack comprises:
forming the metal semiconductor alloy layer on a first substrate composed of a semiconductor material of the semiconductor surface layer;
forming the dielectric layer onto the metal semiconductor alloy layer;
implanting a cleaving dopant into the first substrate;
bonding the dielectric layer onto a second substrate; and
cleaving the first substrate along a cleave line in which the cleaving dopant is present, wherein a remaining portion of the first substrate that is present engaged to the metal semiconductor alloy layer provides the semiconductor surface layer.
3. The method of claim 2 , further comprising:
planarizing the remaining portion of the first substrate that provides the semiconductor surface layer.
4. The method of claim 2 , wherein the cleaving dopant comprises hydrogen implanted by ion implantation.
5. The method of claim 2 , wherein bonding the dielectric layer onto the second substrate comprises hydrophilic bonding.
6. The method of claim 2 , wherein the cleaving the first substrate along the cleave line comprises annealing to induce fracture along the cleave line.
7. The method of claim 1 , wherein the forming the vertical FinFET includes:
forming a first spacer on a remaining exposed portion of the semiconductor surface layer;
forming the gate structure on the first spacer during the forming the gate structure at the side of the vertically orientated channel; and
forming a second spacer on the gate structure.
8. The method of claim 1 , wherein the semiconductor surface layer has a thickness ranging from 5 nm to 100 nm.
9. A method of fabricating a semiconductor device comprising:
forming a dielectric layer on a metal semiconductor alloy layer that is present on a substrate of a semiconductor material;
bonding the dielectric layer to a supporting substrate;
cleaving the substrate of the semiconductor material, wherein a remaining portion of the semiconductor material provides a semiconductor surface layer in direct contact with the metal semiconductor alloy layer and the dielectric layer is on the metal semiconductor alloy layer; and
forming a vertical fin type field effect transistor (FinFET) on the semiconductor surface layer, wherein the semiconductor surface layer provides a first source/drain region of the vertical FinFET and the metal semiconductor alloy layer provides a contact to the first source/drain region, wherein the semiconductor surface layer has a first portion that extends continuously across an entirety of a width of the vertical FinFET and a second portion that has a pedestal geometry for supporting a fin of the vertical FinFET that does not extend the entirety of the width of the vertical FinFET,
wherein the forming the vertical FinFET includes forming a vertically orientated channel of the vertical FinFET having a first end in direct contact with the semiconductor surface layer, forming a second source/drain region on a second end of the vertically oriented channel, and forming a gate structure at a side of the vertically oriented channel, the gate structure including a metal layer, and
wherein a lower surface of the second source/drain region extends laterally over the metal layer of the gate structure.
10. The method of claim 9 , wherein said cleaving the substrate comprises:
implanting a cleaving dopant into the substrate of the semiconductor material; and
cleaving the substrate of the semiconductor material along a cleave line in which the cleaving dopant is present, wherein a remaining portion of the substrate of the semiconductor material that is present engaged to the metal semiconductor alloy layer provides the semiconductor surface layer.
11. The method of claim 10 , further comprising:
planarizing the remaining portion of the substrate of the semiconductor material that provides the semiconductor surface layer.
12. The method of claim 10 , wherein the cleaving dopant comprises hydrogen implanted by ion implantation.
13. The method of claim 10 , wherein the forming the vertical FinFET further includes:
forming a first spacer on the semiconductor surface layer;
forming the gate structure on the first spacer during the forming the gate structure at the side of the vertically oriented channel; and
forming a second spacer on the gate structure.
14. The method of claim 1 , wherein
the forming the gate structure includes forming a gate dielectric layer, and
the gate dielectric layer extends between a side of the second portion of the semiconductor surface layer and a side of the metal layer.
15. The method of claim 9 , wherein
the forming the gate structure includes forming a gate dielectric layer, and
the gate dielectric layer extends between a side of the second portion of the semiconductor surface layer and a side of the metal layer.