Semiconductor device with ferroelectric aluminum nitride
Techniques in accordance with embodiments described herein are directed to semiconductor devices including a layer of aluminum nitride AlN or aluminum gallium nitride AlGaN as a ferroelectric layer and a method of making a thin film of AlN/AlGaN that possesses ferroelectric properties. In a ferroelectric transistor, a thin film of AlN/AlGaN that exhibits ferroelectric properties is formed between a gate electrode and a second semiconductor layer, e.g., of GaN.
1. A structure, comprising:
a substrate;
a layer of GaN over the substrate;
a layer of Al 1-x Ga x N directly over the GaN layer, the Al 1-x Ga x N layer having a ferroelectric property;
a gate electrode over the Al 1-x Ga x N layer; and
a source/drain structure over the GaN layer and adjacent to the gate electrode.
2. The structure of claim 1 , wherein 0≤x≤0.4 in the Al 1-x Ga x N layer.
3. The structure of claim 1 , wherein the source/drain structure is positioned over the Al 1-x Ga x N layer.
4. The structure of claim 1 , wherein the Al 1-x Ga x N layer has a thickness ranging from about 1 nm to 20 nm.
5. The structure of claim 1 , wherein the GaN layer also includes InN.
6. The structure of claim 1 , wherein the substrate includes sapphire.
7. The structure of claim 1 , wherein the substrate is silicon, and further comprising a nucleation layer between the silicon substrate and the GaN layer.
8. The structure of claim 7 , wherein the nucleation layer is AlN.
9. A structure, comprising:
a substrate;
a first layer of a first group-III nitride over the substrate;
a second layer of a second group-III nitride over the first group-III nitride layer, the second group-III nitride containing AlN and having a ferroelectric property; and
a first electrode over the second layer of the second group-III nitride.
10. The structure of claim 9 , further comprising a second electrode contacting the first layer of the first group-III nitride.
11. The structure of claim 9 , further comprising a second electrode contacting the second layer of the second group-III nitride and spaced apart from the first electrode.
12. The structure of claim 9 , further comprising a dielectric layer positioned between the first electrode and the second layer of the second group-III nitride.
13. The structure of claim 10 , wherein the first group-III nitride is un-doped GaN and the second group-III nitride is ferroelectric AlGaN having a thickness less than 20 nm.
14. The structure of claim 9 , wherein the second layer of the second group-III nitride is AlGaN and has a thickness ranging from about 1 nm to about 20 nm.
15. The structure of claim 9 , wherein the substrate includes sapphire.
16. The structure of claim 9 , wherein the first layer of the first group-III nitride includes GaN.
17. The structure of claim 9 , wherein the second group-III nitride is Al 1-x Ga x N with 0≤x≤0.4.
18. A device, comprising:
a substrate;
a layer of a first group-III nitride over the substrate, the first group-III nitride including a first in-plane interatomic distance between a group-III atom and a nitrogen atom, the first in-plane interatomic distance being larger than a second in-plane interatomic distance between an aluminum atom and a nitrogen atom in aluminum nitride; and
a layer of aluminum nitride over the layer of the first group-III nitride, the layer of aluminum nitride having a thickness less than 20 nm;
wherein the layer of aluminum nitride has a same facet direction as the layer of the first group-III nitride.
19. The device of claim 18 , wherein the a layer of aluminum nitride includes a ferroelectric property.
20. A device, comprising:
a substrate;
a layer of a first group-III nitride over the substrate, the first group-III nitride including a first in-plane interatomic distance between a group-III atom and a nitrogen atom, the first in-plane interatomic distance being larger than a second in-plane interatomic distance between an aluminum atom and a nitrogen atom in aluminum nitride; and
a layer of aluminum nitride over the layer of the first group-III nitride, the layer of aluminum nitride having a thickness less than 20 nm;
wherein the a layer of aluminum nitride includes a ferroelectric property.
21. The device of claim 20 , wherein the layer of aluminum nitride has a same facet direction as the layer of the first group-III nitride.