3D printed semiconductor package
In described examples, a method for encapsulating a semiconductor device includes the steps of immersing a layer of the semiconductor device in a liquid encapsulation material, irradiating portions of the liquid encapsulation material to polymerize the liquid encapsulation material, and moving the semiconductor device further from a surface of the liquid encapsulation material proximate to the layer. Immersing the semiconductor device is performed to cover a layer of the device in the liquid encapsulation material. Targeted locations of the liquid encapsulation material covering the layer are irradiated to form solid encapsulation material. The semiconductor device is moved from a surface of the liquid encapsulation material so that a new layer of the semiconductor device and/or of the solid encapsulation material can be covered by the liquid encapsulation material. The irradiating and moving steps are then repeated until a three dimensional structure on the semiconductor device is formed using the solid encapsulation material.
1. An encapsulated semiconductor device, comprising:
a semiconductor die having a surface, the semiconductor die including an integrated circuit; and
a solid encapsulation material covering the semiconductor die, the solid encapsulation material having a three-dimensional shape including at least one of: an object in and surrounded by a cavity; a microfluidic channel; a wire in and surrounded by a hollow tube; a hole configured to transmit light; or a button configured to contact at least a portion of the surface when depressed;
in which a gas or a liquid or a solid, other than the solid encapsulation material, is between: at least a portion of the surface; and at least a portion of the solid encapsulation material.
2. The encapsulated semiconductor device of claim 1 , wherein the liquid is a liquid photopolymer resin, and the solid encapsulation material is a solid polymerized resin.
3. The encapsulated semiconductor device of claim 1 , wherein the semiconductor die is a first semiconductor die, and the encapsulated semiconductor device further comprises a second semiconductor die covered by the solid encapsulation material.
4. The encapsulated semiconductor device of claim 3 , wherein the first and second semiconductor dies are vertically stacked.