Structure and methods of forming the structure
View Patent ↗Capacitors, apparatus including a capacitor, and methods for forming a capacitor are provided. One such capacitor may include a first conductor a second conductor above the first conductor, and a dielectric between the first conductor and the second conductor. The dielectric does not cover a portion of the first conductor; and the second conductor does not cover the portion of the first conductor not covered by the dielectric.
1. A semiconductor device comprising:
a three-dimensional (3D) memory cell region; and
a peripheral region adjacent to the memory cell region including a structure configured to provide capacitance for use during operation of the 3D memory cell region, the structure including:
a first conductive level, a second conductive level above the first conductive level, and a third conductive level above the second conductive level, wherein the second conductive level is stepped back from an upper surface end portion of the first conductive level and the third conductive level is stepped back from an upper surface end portion of the second conductive level; and
first and second dielectric levels, wherein the first dielectric level is disposed between the first and second conductive levels and does not cover at least a part of the upper surface end portion of the first conductive level, and wherein the second dielectric level is disposed between the second and third conductive levels and does not cover at least a portion of the upper surface end portion of the second conductive level.
2. The semiconductor device of claim 1 , wherein the 3D memory cell region comprises a stacked body having multiple word line levels comprising a conductive material and respectively disposed one above the other, and
multiple dielectric levels, wherein one of the multiple dielectric levels is interposed between a respective two adjacent word line levels of the multiple word line levels.
3. The semiconductor device of claim 1 , wherein the 3D memory cell region includes one or more strings of memory cells formed through a stacked body comprising N planar conductive levels and N−1 dielectric material levels.
4. The semiconductor device of claim 3 , wherein the stacked body includes at least one pillar-shaped semiconductor structure.
5. The semiconductor device of claim 4 , wherein the at least one pillar-shaped semiconductor structure includes a silicon pillar and an oxide-nitride-oxide film encircling the silicon pillar.
6. The semiconductor device of claim 1 , wherein the peripheral region is further configured to supply at least one voltage to the 3D memory cell region.
7. The semiconductor device of claim 1 , further comprising:
a first contact electrode and a second contact electrode, wherein the first contact electrode and the second contact electrode are electrically isolated from one another; and
contacts electrically coupled to the first conductive level and the third conductive level, a first of the contacts being disposed on a first lateral side of a respective portion of the first conductive level and a second contact being disposed on a respective portion of the second conductive level, wherein the first contact is coupled to the first contact electrode, and the second contact is coupled to the second contact electrode.
8. The semiconductor device of claim 7 , wherein the first contact electrode is substantially coplanar with the second contact electrode.
9. The semiconductor device of claim 7 , wherein the first contact electrode is coupled only to even-numbered ones of the conductive levels and the second contact electrode is coupled only to odd-numbered ones of the conductive levels.
10. The semiconductor device of claim 1 , wherein at least one of the conductive levels is not coupled to a contact and is allowed to float.
11. The semiconductor device of claim 1 , further comprising a charge pump.
12. The semiconductor device of claim 11 , further comprising a switching circuit configured to provide a voltage to the charge pump from a voltage source.
13. The semiconductor device of claim 11 , wherein the charge pump includes at least two capacitive elements formed from the conductive levels and the dielectric levels, the conductive levels of the at least two capacitive elements corresponding to word lines of the 3D memory cell region.
14. An apparatus, comprising:
a three-dimensional (3D) memory cell region; and
a peripheral region adjacent to the memory cell region including a structure configured to provide capacitance for use during operation of the 3D memory cell region through multiple capacitors formed therein, wherein the multiple capacitors are formed by first, second, and third conductive levels arranged one above the other, wherein the conductive levels are separated from one another by first and second dielectric levels; and
a charge pump region having a number of pump stages to supply at least one voltage to the 3D memory cell region through one or more contact electrodes electrically coupled to the 3D memory cell region.
15. The apparatus of claim 14 , wherein each of the pump stages includes:
a first conductive level, a second conductive level above the first conductive level, and a third conductive level above the second conductive level, each of the conductive levels stepped back from an upper surface end portion of an underlying one of remaining ones of the conductive levels; and
first and second dielectric levels, each dielectric level disposed between respective adjacent conductive levels, each of the dielectric levels not covering at least some part of the upper surface end portion of an underlying conductive level, further comprising a switching circuit to provide a voltage to the charge pump.