Method for measuring Z height values of a workpiece surface with a machine vision inspection system

1. A method for measuring Z height values of a workpiece surface with a machine vision inspection system, the method comprising:

illuminating a workpiece surface with structured light;

collecting at least two stacks of images of the workpiece with an image detector of the machine vision inspection system, each stack including a different X-Y position between the structured light and the workpiece surface at a corresponding Z height in each of the stacks, where the X-Y position is changed at a slower rate than the Z height in each stack of images, and where the X-Y positions are changed either:

a) continuously during each of the at least two stacks of images at a slower rate than the Z shift; or

b) fixed to a different value during each of the at least two stacks of images where each stack is collected in a continuous Z shift; and

determining Z values based on sets of intensity values of a pixel of the image detector corresponding to the same workpiece position in the X-Y plane which are at the same Z heights.

2. The method of claim 1 , wherein determining Z values comprises computing a contrast metric of the intensity values corresponding to the same Z heights and determining a Z height value based on a Z height corresponding to a set of pixel intensity values which has the maximum contrast metric.

3. The method of claim 2 , wherein the contrast metric is a standard deviation.

4. The method of claim 1 , wherein changing the X-Y positions comprises shifting in a rectangular path.

5. The method of claim 1 , wherein changing the X-Y positions comprises shifting in a circular path.

6. The method of claim 1 , wherein the structured light is periodic in at least one dimension.

7. The method of claim 6 , wherein the structured light comprises stripes.

8. The method of claim 6 , wherein a structured light pattern has a spatial period corresponding to less than 20 pixels as imaged on the image detector in at least one dimension.

9. The method of claim 1 , wherein the structured light is periodic in two dimensions.

10. The method of claim 9 , wherein the structured light comprises checkers.

11. The method of claim 1 , wherein the structured light is generated from one of a spatial light modulator, a chrome on glass mask, or a set of pinholes.

12. The method of claim 1 , wherein collecting the at least two stacks of images comprises moving a Z position of a stage of the machine vision inspection system.

13. The method of claim 1 , wherein collecting the at least two stacks of images comprises using an internal piezoelectric element to change a focus height of an optical assembly portion of the machine vision inspection system.

14. The method of claim 1 , wherein collecting the at least two stacks of images comprises using a variable focal length lens to change a focus height of an optical assembly portion of the machine vision inspection system.

15. The method of claim 1 , wherein changing the X-Y position comprises moving an X-Y position of a stage of the machine vision inspection system.

16. The method of claim 1 , wherein changing the X-Y position comprises moving an X-Y position of the structured light with a spatial light modulator.

17. The method of claim 1 , wherein changing the X-Y position comprises translating an X-Y position of the structured light with a mask.

18. The method of claim 1 , wherein changing the X-Y position comprises rotating an X-Y position of the structured light with a mask.

19. The method of claim 1 , wherein changing the X-Y position comprises moving an X-Y position of the structured light by optical beam displacement.

20. The method of claim 2 , wherein the contrast metric is a maximum difference in intensities.