Semiconductor structure
Semiconductor structures are provided. A semiconductor structure includes a substrate, a conductive plate of a first metal layer over the substrate, a first resistor material of a resistor layer over the conductive plate, a high-K material formed between the first resistor material and the conductive plate, a first conductive line of a second metal layer over the resistor layer, and a first via formed between the first conductive line and the first resistor material. The conductive plate, the first resistor material and the high-K material form a capacitor between the first and second metal layers. The first distance between the first resistor material and the conductive plate is less than the second distance between the first resistor material and the first conductive line.
1. A semiconductor structure, comprising:
a substrate;
a conductive plate of a first metal layer over the substrate;
a first resistor material of a resistor layer over the conductive plate;
a high-K material formed between the first resistor material and the conductive plate;
a first conductive line of a second metal layer over the resistor layer; and
a first via formed between the first conductive line and the first resistor material;
a third metal layer over the second metal layer, wherein a distance between the second and third metal layers is less than a distance between the first and second metal layers,
wherein the conductive plate, the first resistor material and the high-K material form a capacitor between the first and second metal layers,
wherein a first distance between the first resistor material and the conductive plate is less than a second distance between the first resistor material and the first conductive line.
2. The semiconductor structure as claimed in claim 1 , further comprising:
a second resistor material of the resistor layer;
a second conductive line of the second metal layer;
a third conductive line of the second metal layer;
a second via formed between the second conductive line and the second resistor material; and
a third via formed between the third conductive line and the second resistor material,
wherein the second resistor material forms a resistor between the second and third conductive lines.
3. The semiconductor structure as claimed in claim 2 , wherein a distance from the second resistor material to the second conductive line or the third conductive line is identical to the second distance between the first resistor material and the first conductive line.
4. The semiconductor structure as claimed in claim 1 , further comprising:
a second conductive line of the second metal layer; and
a second via formed between the second conductive line and the conductive plate,
wherein a via height of the first via is less than a via height of the second via.
5. The semiconductor structure as claimed in claim 1 , wherein a capacitance of the capacitor is determined according to an overlapping area of the first resistor material and the conductive plate.
6. A semiconductor structure, comprising:
a substrate;
a first metal layer over the substrate;
a second metal layer over the first metal layer;
a resistor between the first and second metal layers, comprising:
a first resistor material of a resistor layer;
a capacitor, comprising:
a first electrode plate formed by a metal plate of the first metal layer;
a high-K material over the first electrode plate; and
a second electrode plate over the high-K material and formed by a second resistor material of the resistor layer; and
a third metal layer over the second metal layer, wherein a distance between the second and third metal layers is less than a distance between the first and second metal layers.
7. The semiconductor structure as claimed in claim 6 , wherein a first distance between the first and second electrode plates of the capacitor is less than a second distance between the second electrode plate and the second metal layer.
8. The semiconductor structure as claimed in claim 7 , wherein a thickness of the high-K material is identical to the first distance between the first and second electrode plates of the capacitor.
9. The semiconductor structure as claimed in claim 6 , wherein a capacitance of the capacitor is determined according to an overlapping area of the first and second electrode plates.
10. The semiconductor structure as claimed in claim 6 , wherein a terminal of the resistor is electrically connected to a first metal line of the second metal layer, and another terminal of the resistor is electrically connected to a second metal line of the second metal layer.
11. The semiconductor structure as claimed in claim 6 , wherein the first electrode plate of the capacitor is coupled to a first metal line of the second metal layer through a first via, and the second electrode plate of the capacitor is coupled to second metal line of the second metal layer through a second via, and the first via has a higher via height than the second via.
12. The semiconductor structure as claimed in claim 6 , wherein the first and second resistor materials are the same material.
13. The semiconductor structure as claimed in claim 6 , further comprising:
a fourth metal layer under the first metal layer,
wherein a distance between the fourth and first metal layers is less than the distance between the first and second metal layers.
14. A semiconductor structure, comprising:
a substrate;
a first metal layer over the substrate;
a second metal layer over the first metal layer;
a resistor between the first and second metal layers, comprising:
a first resistor material of a resistor layer; and
a capacitor, comprising:
a first electrode plate formed by a metal plate of the second metal layer;
a high-K material under the first electrode plate; and
a second electrode plate under the high-K material and formed by a second resistor material of the resistor layer.
15. The semiconductor structure as claimed in claim 14 , wherein a first distance between the first and second electrode plates of the capacitor is less than a second distance between the second electrode plate and the first metal layer.
16. The semiconductor structure as claimed in claim 15 , wherein a thickness of the high-K material is identical to the first distance between the first and second electrode plates of the capacitor.
17. The semiconductor structure as claimed in claim 14 , wherein a capacitance of the capacitor is determined according to an overlapping area of the first and second electrode plates.
18. The semiconductor structure as claimed in claim 14 , wherein a terminal of the resistor is electrically connected to first metal line of the second metal layer, and another terminal of the resistor is electrically connected to second metal line of the second metal layer.
19. The semiconductor structure as claimed in claim 14 , wherein the first and second resistor materials are the same material.
20. The semiconductor structure as claimed in claim 2 , wherein the first distance between the first resistor material and the conductive plate is less than a third distance between the second resistor material and the second metal layer.