Plasma-resistant member
According to an aspect of the invention, there is provided a plasma-resistant member including: a base member; and a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant, the layer structural component including a first uneven structure, and a second uneven structure formed to be superimposed onto the first uneven structure, the second uneven structure having an unevenness finer than an unevenness of the first uneven structure.
1. A plasma-resistant member, comprising:
a base member; and
a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant,
in the case where a cut-off of surface analysis is 0.8 μm:
the arithmetic average Sa of a surface of the layer structural component being not less than 0.010 μm and not more than 0.035 μm;
the core material volume Vmc determined from a load curve of the surface of the layer structural component being not less than 0.01 μm 3 /μm 2 and not more than 0.035 μm 3 /μm 2 ;
the core void volume Vvc determined from the load curve of the surface of the layer structural component is not less than 0.012 μm 3 /μm 2 and not more than 0.05 μm 3 /μm 2 ;
the developed interfacial area ratio Sdr of the surface of the layer structural component is not less than 1 and not more than 17; and
the root mean square slope SΔq of the surface of the layer structural component is not less than 0.15 and not more than 0.6.
2. The plasma-resistant member according to claim 1 , wherein the layer structural component has a sparse and dense structure of the yttria polycrystalline body, wherein the sparse and dense structure includes sparse portions and a dense portion, and a density of the sparse portions is less than a density of the dense portion.
3. The plasma-resistant member according to claim 2 , wherein the sparse portions and the dense portion are distributed along a first direction, the first direction being a direction from the layer structural component to the base member, the sparse portions become smaller along the first direction.
4. The plasma-resistant member according to claim 2 , wherein the sparse and dense structure includes the sparse portions distributed three-dimensionally inside the dense portion.
5. The plasma-resistant member according to claim 1 , wherein the layer structural component is formed by aerosol deposition.