Flexible display device and method of manufacturing flexible display device
A method of manufacturing a flexible display device includes forming a graphene adhesive layer on a carrier substrate, forming a flexible substrate on the graphene adhesive layer, forming a first barrier layer on the flexible substrate, forming a display element part on the first barrier layer, forming a protective film on the display element part, separating the flexible substrate from the carrier substrate, removing a remaining portion of the graphene adhesive layer from a surface of the flexible substrate, and forming a second barrier layer on the surface of the flexible substrate, after removing the remaining portion of the graphene adhesive layer from the surface of the flexible substrate.
1. A flexible display device, comprising:
a flexible substrate;
a first barrier layer on a first surface of the flexible substrate;
a display element part on the first barrier layer; and
a second barrier layer on a second surface of the flexible substrate opposite the first surface, the second barrier layer including:
an interfacial layer including, silicon oxycarbide, the interfacial layer contacting the flexible substrate; and
an outer layer including at least one of silicon oxide, silicon nitride, and silicon oxinitride, the outer layer being on the interfacial layer and spaced apart from the flexible substrate.
2. The flexible display device as claimed in claim 1 , wherein the first barrier layer includes a multiple-layer structure of silicon oxide (SiO 2 )/silicon nitride (SiN)/silicon oxynitride (SiON).
3. The flexible display device as claimed in claim 1 , wherein the flexible substrate includes at least one of polyester, polyvinyl, polycarbonate, polyethylene, polypropylene, polyacetate, polyimide, polyethersulphone (PES), polyacrylate (PAR), polyethylenenaphthelate (PEN) and polyethyleneterephehalate (PET).
4. The flexible display device as claimed in claim 1 , wherein the display element part includes:
a pixel circuit;
an organic light-emitting diode electrically connected to the pixel circuit; and
a thin film encapsulation layer covering the organic light-emitting diode.