Integrated pre-matching module for impedance tuner
View Patent ↗An integrated manual pre-matching module for on-wafer load pull tuner operation uses a mobile rack and a rotating reflective probe, mounted and sliding on the tuner slabline extension. Both the tuning probe position and immersion into the slabline are controlled using sidewise mounted easily accessible knobs. The low profile of the module does not conflict with the microscope and allows integrating on the extended slabline of the tuner in immediate proximity of the wafer probe, thus minimizing any additional insertion loss and maximizing tuning range. Manual handling of the pre-matching tuning module is easy and efficient without disturbing the on-wafer load pull operations.
1. A manual pre-matching module, mounted on the slabline of an impedance tuner, comprising
a rack and pinion mechanism,
a metallic tuning disc-probe having an axis and concave periphery,
two manual control knobs #1 and #2,
wherein
the tuner has a housing, a test port and an idle port,
the slabline has two sidewalls and a center conductor,
the rack slides on top of and along one sidewall,
the pinion is attached to the sidewall and controls the rack,
the disc-probe is insertable between the sidewalls and its axis traverses the rack and is perpendicular to the slabline.
2. The disc-probe of claim 1 is circular and rotates eccentrically.
3. The disc-probe of claim 1 is elliptical.
4. The disc-probe of claim 1 is oval.
5. The tuner of claim 2 or 3 or 4 ,
wherein
the slabline extends beyond the tuner housing at the test port,
the extended portion is inclined to match a wafer-probe,
the module is mounted on the extended inclined portion,
and wherein
the penetration of the disc-probe between the sidewalls is controlled by rotating the disc using knob #2;
the position of the rack along the slabline is controlled by rotating the pinion using knob #1.
6. The module as in claim 1 ,
wherein
the rotational axis of the pinion is attached to a bracket, which is anchored on the side of the slabline sidewall, on which the rack slides.
7. The slabline as in claim 1 ,
wherein the distance between the vertical sidewalls and the diameter of the center conductor are selected to form a characteristic impedance Zo=50Ω.
8. The module of claim 1
wherein
the disc-probe, slide fits between the sidewalls of the slabline and immerses or withdraws, approaching the center conductor when rotated by the knob #2.