MEMS actuator structures resistant to shock
Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.
1. A motion control flexure for a microelectromechanical systems (MEMS) device, comprising:
a rod comprising a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends;
a first hinge directly coupled to the first end of the rod; and
a second hinge directly coupled to the second end of the rod, wherein the first and second hinges are each coupled to a respective frame of a MEMS actuator.
2. The motion control flexure of claim 1 , wherein the rod is between 1 and 4 mm long and between 10 and 70 μm wide.
3. The motion control flexure of claim 2 , wherein each of the first and second hinges is between 0.05 and 0.3 mm long and between 1 and 10 μm wide.
4. The motion control flexure of claim 3 , wherein the motion control flexure is rigid in a direction along its length and flexible in a direction perpendicular to its length.
5. The motion control flexure of claim 2 , wherein the rod is about 50 μm wide at is center and about 35 μm wide at its first and second ends.