Switching device, method of fabricating the same, and non-volatile memory device having the same
View Patent ↗The present invention relates to a switching device, a method of fabricating the same, and a nonvolatile memory device including the same. A switching device according to an embodiment of the present invention includes a first electrode; a second electrode; and a switching film which is disposed between the first electrode and the second electrode, and includes an electrically insulating matrix and a conductive path formed in the electrically insulating matrix. In this embodiment, the conductive path includes crystalline metal clusters dispersed in the electrically insulating matrix and a metal bridge connecting adjacent crystalline metal clusters.
1. A switching device coupled in series to a variable resistor that stores logic values by changing a resistance state, the switching device being a selection element in which on-current flows when a voltage is applied in a set state and on-current does not flow when the voltage is applied in a reset state, the switching device comprising,
a first electrode;
a second electrode; and
a switching film disposed between the first electrode and the second electrode, the switching film having an electrically insulating matrix and a conductive path formed in the electrically insulating matrix;
wherein the conductive path includes crystalline metal clusters dispersed in the electrically insulating matrix and a metal bridge connecting adjacent crystalline metal clusters, and the crystalline metal clusters have a crystal orientation plane.
2. The switching device according to claim 1 , wherein the metal bridge has an amorphous structure.
3. The switching device according to claim 1 , wherein the metal bridge provides a trap-limited conduction mechanism within the electrically insulating matrix.
4. The switching device according to claim 1 , wherein the crystallin:
metal clusters and the metal bridge comprise tellurium.
5. The switching device according to claim 1 , wherein the electrically insulating matrix includes an oxide material, a nitride material, or a combination thereof, and
wherein the oxide material or the nitride material is an oxide or nitride of a metal, a metalloid or a non-metal element.
6. The switching device according to claim 5 , wherein the metal, the metalloid or the non-metal element of the electrically insulating matrix is thermodynamically more difficult to alloy with constituent metals of the crystalline metal clusters than coalescence or agglomeration of the constituent metals of the crystalline metal clusters.
7. The switching device according to claim 1 , wherein the electrically insulating matrix includes silicon oxide, silicon nitride, antimony oxide, or a combination thereof.
8. The switching device according to claim 1 , wherein the electrically insulating matrix includes silicon oxide, and the switching film has a composition ratio according to Formula 1:
Te X Si Y O Z (0<X≤1, 0<Y≤1, 0≤Z≤1). [Formula 1]
9. The switching device according to claim 1 , wherein the electrically insulating matrix includes silicon nitride, and the switching film has a composition ratio according to Formula 2:
Te X Si Y N Z (0<X≤1, 0<Y≤1, 0≤Z≤1) [Formula 2]
10. The switching device according to claim 1 , wherein the electrically insulating matrix includes antimony oxide, and the switching film has a composition ratio according to Formula 3:
Te X Sb Y O Z (0<X≤10, 0<Y≤10, 0≤Z≤10). [Formula 3]
11. The switching device according to claim 1 , wherein a concentration of the metal constituting the metal clusters and the metal bridge in the switching film is from 20 at. % to 30 at. %.
12. The switching device according to claim 1 , wherein a thickness of the switching film is from 80 nm to 400 nm.
13. The switching device according to claim 1 , wherein the switching film has a conductive mechanism based on trap-limited conduction.
14. The switching device according to claim 1 , wherein at least any one of the first electrode and the second electrode includes titanium (Ti), tantalum (Ta), copper (Cu), aluminum (Al), nickel (Ni), platinum (Pt), palladium (Pd), or rhodium (Rh), tungsten (W), silicon (Si), TiN, TaN, WSix, NiSix, CoSix, or TiSix.
15. A non-volatile memory device comprising:
the switching device according to claim 1 ; and
a non-volatile memory element electrically connected in series to the switching device, the non-volatile memory element being the variable resistor.
16. A switching device coupled in series to a variable resistor that stores logic values by changing a resistance state, the switching device being a selection element in which on-current flows when a voltage is applied in a set state and on-current does not flow when the voltage is applied in a reset state, the switching device comprising,
a first electrode;
a second electrode; and
a switching film disposed between the first electrode and the second electrode, the switching film having an electrically insulating matrix and a conductive path formed in the electrically insulating matrix;
wherein the conductive path includes crystalline metal clusters dispersed in the electrically insulating matrix and a metal bridge connecting adjacent crystalline metal clusters, the crystalline metal clusters have a crystal orientation plane and the metal bridge has an amorphous structure, and
wherein the crystalline metal clusters and the metal bridge consist of tellurium.