Modular confined organic print head and system
Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.
1. A system comprising:
one or more print heads that eject organic vapor laden gas into a chamber and withdraw chamber gas,
one or more distribution nozzles disposed on a chiller plate that surrounds the one or more print heads, wherein the one or more distribution nozzles output confinement gas to isolate the one or more print heads from the chamber ambient,
wherein vapor ejected from the one or more print heads is incident on, and condenses onto, a deposition surface within the chamber, and wherein the deposition surface moves relative to the one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold,
wherein the volumetric flow of gas withdrawn by the one or more print heads from the chamber is greater than the volumetric flow of gas injected into the chamber by the one or more print heads,
wherein the net outflow of gas from the chamber through the one or more print heads prevents organic vapor from diffusing beyond the extent of the gap between the one or more print heads and a deposition surface, and
wherein the one or more print heads are configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.
2. The system of claim 1 , wherein the one or more print heads comprise one or more delivery apertures.
3. The system of claim 2 , wherein the one or more delivery apertures are surrounded by exhaust apertures disposed between the delivery apertures and an edge of the one or more print heads.
4. The system of claim 1 , wherein the one or more print heads include one or more heated organic vapor sources.
5. The system of claim 1 , wherein the vapor ejected to form a deposition on the deposition surface has a flow where a Peclet number Pe<10 with respect to a binary diffusivity of a delivery gas and a confinement gas.
6. The system of claim 1 , further comprising:
a process chamber that includes the one or more print heads and an aperture assembly of the one or more print heads that both ejects organic vapor laden inert delivery gas into the process chamber and withdraws chamber gas,
wherein the one or more print heads eject vapor that is incident on, and condenses onto, a deposition surface within the process chamber, and
wherein the deposition surface is configured to move relative to the one or more print heads in a direction orthogonal to the deposition surface normal and a linear extent of the vapor distribution manifold.
7. The system of claim 6 , wherein a net outflow of gas from the process chamber through the one or more print heads prevents organic vapor from diffusing beyond a gap between the one or more print heads and the deposition surface.
8. The system of claim 6 , wherein the aperture assembly balances a deposition flow and an exhaust flow so that deposition material is confined to an area under the one or more print heads.
9. The system of claim 6 , wherein the process chamber includes at least one from the group consisting of: organic vapor jet printing (OVJP) equipment, and metrology equipment.
10. The system of claim 6 , wherein the process chamber includes at least one confined organic printer (COP) head and at least one organic vapor jet printing (OVJP) head.
11. The system of claim 6 , wherein the process chamber is operated at a pressure of between 50 and 300 Torr.
12. The system of claim 6 , wherein the process chamber is operated at a pressure of between 20 and 800 Torr.
13. The system of claim 1 , wherein at least one of the one or more print heads deposits the same organic species in the same ratio or in different ratios than other confined organic printer (COP) heads.
14. The system of claim 1 , wherein at least one of the one or more print heads deposits different organic species from the other print heads.
15. The system of claim 1 , further comprising:
a deposition aperture to deposit gaseous precursors or substances as deposition materials, wherein the deposition materials are confined to a volume defined by the area under the deposition apertures by a confining flow and localized exhaust.
16. The system of claim 15 , wherein a shape of the deposition aperture has a first axis that is 10 times greater in length than a second axis.
17. The system of claim 15 , wherein a shape of the deposition aperture matches an unmasked area of a substrate on which the deposition materials are deposited.
18. The system of claim 1 , wherein the deposition surface is a portion of a roll of flexible material.
19. The system of claim 1 , wherein the one or more print heads are spaced from and adjacent to a chiller plate.
20. The system of claim 1 , wherein the deposition surface is a platen.