Shadow ring for modifying wafer edge and bevel deposition
Embodiments of the invention contemplate a shadow ring that provides increased or decreased and more uniform deposition on the edge of a wafer. By removing material from the top and/or bottom surfaces of the shadow ring, increased edge deposition and bevel coverage can be realized. In one embodiment, the material on the bottom surface is reduced by providing a recessed slot on the bottom surface. By increasing the amount of material of the shadow ring, the edge deposition and bevel coverage is reduced. Another approach to adjusting the deposition at the edge of the wafer includes increasing or decreasing the inner diameter of the shadow ring. The material forming the shadow ring may also be varied to change the amount of deposition at the edge of the wafer.
1. A method of forming a shadow ring for use in a deposition chamber, the method comprising:
forming an annular body having a top surface and a bottom surface, the bottom surface including a first annular bottom surface and a second annular bottom surface, wherein the second annular bottom surface is disposed in a recessed slot located inwardly relative to the first annular bottom surface, the second annular bottom surface located a first distance above the first annular bottom surface;
forming at least one pin member extending from the first annular bottom surface; and
forming an annular lip extending inwardly relative to the recessed slot and the first annular bottom surface, wherein the annular lip has a third annular bottom surface located a second distance above the first annular bottom surface, the second distance less than the first distance, and wherein the recessed slot is formed between the pin member and the annular lip.
2. The method of claim 1 , wherein the at least one pin member has tapered sides.
3. The method of claim 1 , wherein the at least one pin member is frustoconically shaped.
4. The method of claim 1 , wherein the recessed slot has a width of about 0.254 mm or greater.
5. The method of claim 1 , further comprising:
forming one or more projections positioned on an outer diameter of the annular body; and
forming a vertical surface connecting the third annular bottom surface of the annular lip to the second annular bottom surface disposed in the recessed slot.
6. The method of claim 1 , wherein the shadow ring is made of a material comprising aluminum nitride.
7. The method of claim 1 , wherein the recessed slot has a first sidewall having a first length as measured from the first annular bottom surface to the second annular bottom surface and a second sidewall having a second length as measured from the third annular bottom surface to the second annular bottom surface, wherein the second length is less than the first length.
8. A method of forming a shadow ring for use in a deposition chamber, the method of forming the shadow ring comprising:
forming a first annular bottom surface for supporting the shadow ring in the chamber body;
forming at least one pin member extending from the first annular bottom surface;
forming a second annular bottom surface disposed in a recessed slot located inwardly relative to the first annular bottom surface, the second annular bottom surface located a first distance above the first annular bottom surface; and
forming an annular lip extending inwardly relative to the recessed slot, wherein the annular lip has a third annular bottom surface located a second distance above the first annular bottom surface, the second distance less than the first distance, and wherein the recessed slot is formed between the pin member and the annular lip.
9. The method of claim 8 , further comprising forming a vertical surface connecting the third annular bottom surface of the annular lip to the second annular bottom surface disposed in the recessed slot.
10. The method of claim 8 , wherein the at least one pin member has tapered sides.
11. The method of claim 8 , wherein the at least one pin member is frustoconically shaped.
12. The method of claim 8 , wherein the shadow ring is made of a material comprising aluminum nitride.
13. The method of claim 8 , wherein the recessed slot has a first sidewall having a first length as measured from the first annular bottom surface to the second annular bottom surface and a second sidewall having a second length as measured from the third annular bottom surface to the second annular bottom surface, wherein the second length is less than the first length.