Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
A piezoelectric device includes in a piezoelectric layer, a recessed portion which is provided outside an active portion and opens on the side opposite to a substrate is provided, in a lamination direction of the substrate and a piezoelectric element, a first barrier layer formed of a material other than the zirconium oxide is formed in a region of a vibration plate opposite to the substrate and overlapping a bottom surface of the recessed portion, and the first barrier layer is not formed in a portion of a region overlapping the active portion in the lamination direction.
1. A piezoelectric device comprising:
a substrate on which a plurality of first recessed portions are formed;
a vibration plate that is provided on one surface side of the substrate and has a zirconium oxide layer containing zirconium oxide as an uppermost layer on a side opposite to the substrate; and
a piezoelectric element that has a first electrode provided on the one surface side of the substrate via the vibration plate, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer,
wherein in the piezoelectric element, an active portion of the piezoelectric layer interposed between the first electrode and the second electrode is provided independently for each of the first recessed portions,
the first electrode forms an individual electrode provided independently for each of the active portions,
the second electrode forms a common electrode commonly provided to a plurality of the active portions,
in the piezoelectric layer, a second recessed portion which is provided outside the active portion and opens on the side opposite to the substrate is provided,
in a lamination direction of the substrate and the piezoelectric element, a first barrier layer formed of a material other than the zirconium oxide is formed in a region of the vibration plate opposite to the substrate and overlapping a bottom surface of the second recessed portion,
the first barrier layer is not formed in a portion of a region overlapping the active portion in the lamination direction, and
the first barrier layer provided in the region overlapping the bottom surface of the second recessed portion in the lamination direction is sandwiched between the vibration plate and the second electrode.
2. The piezoelectric device according to claim 1 ,
wherein the plurality of the active portions are disposed in parallel in a first direction, and
the second recessed portions are provided on both sides of the active portion in the first direction.
3. A liquid ejecting head comprising:
the piezoelectric device according to claim 2 .
4. The piezoelectric device according to claim 1 ,
wherein in the lamination direction, the second recessed portion and the first recessed portion are disposed on at least a position partially overlapping each other.
5. A liquid ejecting head comprising:
the piezoelectric device according to claim 4 .
6. The piezoelectric device according to claim 1 ,
wherein the first barrier layer extends from the region overlapping the bottom surface of the second recessed portion toward the active portion side in the lamination direction.
7. The piezoelectric device according to claim 6 ,
wherein a portion of the first barrier layer extending toward the active portion side is provided between the piezoelectric layer and the second electrode.
8. A liquid ejecting head comprising:
the piezoelectric device according to claim 7 .
9. The piezoelectric device according to claim 6 ,
wherein a portion of the first barrier layer extending toward the active portion side is provided between the vibration plate and the piezoelectric layer.
10. The piezoelectric device according to claim 9 ,
wherein the first barrier layer is formed of a metal.
11. A liquid ejecting head comprising:
the piezoelectric device according to claim 6 .
12. The piezoelectric device according to claim 1 ,
wherein the first barrier layer has an amorphous oxide film or a nitride film.
13. The piezoelectric device according to claim 1 ,
wherein the second recessed portion is provided so as to penetrate the piezoelectric layer in the lamination direction, and
at the bottom surface of the second recessed portion, the vibration plate, the first barrier layer, and the second electrode are laminated in this order from the substrate side.
14. The piezoelectric device according to claim 1 ,
wherein a second barrier layer formed of a material different from that of the first barrier layer is provided between the piezoelectric layer of the active portion and the second electrode.
15. The piezoelectric device according to claim 14 ,
wherein in the lamination direction, the first barrier layer and the second barrier layer are disposed on at least a position partially overlapping each other.
16. The piezoelectric device according to claim 14 ,
wherein the second barrier layer is formed of a metal.
17. A liquid ejecting head comprising:
the piezoelectric device according to claim 1 .
18. A liquid ejecting apparatus comprising:
the liquid ejecting head according to claim 17 .
19. The piezoelectric device according to claim 1 , wherein, in a region that does not overlap the bottom surface of the second recessed portion in the lamination direction, the first barrier layer overlaps the piezoelectric layer in the lamination direction, and the first barrier layer is sandwiched between the piezoelectric layer and the second electrode.