Solid state optoelectronic device with preformed metal support substrate
A wafer-level process for manufacturing solid state lighting (“SSL”) devices using large-diameter preformed metal substrates is disclosed. A light emitting structure is formed on a growth substrate, and a preformed metal substrate is bonded to the light emitting structure opposite the growth substrate. The preformed metal substrate can be bonded to the light emitting structure via a metal-metal bond, such as a copper-copper bond, or with an inter-metallic compound bond.
1. A method of manufacturing a solid state lighting (“SSL”) device, the method comprising:
providing a light emitting structure having a first semiconductor material, a second semiconductor material, and an active region between the first and second semiconductor materials;
forming a metal bonding structure on the light emitting structure;
bonding a preformed metal substrate to the metal bonding structure at a first temperature; and
debonding the preformed metal substrate from a temporary carrier at a second temperature, wherein the second temperature is higher than the second temperature.
2. The method of claim 1 , further comprising:
growing the light emitting structure on a growth substrate, and
removing the growth substrate from the light emitting structure by at least one of grinding, post-grinding, wet etching, or dry etching.
3. The method of claim 2 , wherein the growth substrate is removed after the metal bonding structure is formed.
4. The method of claim 1 , wherein the light emitting structure extends continuously over a surface of the preformed metal substrate.
5. The method of claim 1 , further comprising forming an inter-metallic compound (“IMC”) bond between the preformed metal substrate and the metal bonding structure.
6. The method of claim 5 , wherein the IMC bond includes a first boundary region proximate the preformed metal substrate, a second boundary region proximate the light emitting structure, and a median region between the first and second boundary regions.
7. The method of claim 1 , wherein the preformed metal substrate includes a metal blank.
8. The method of claim 1 , wherein the preformed metal substrate includes a metal plate.
9. The method of claim 1 , wherein the preformed metal substrate has a thickness sufficient to inhibit bowing of the light emitting structure.
10. The method of claim 1 , wherein the preformed metal substrate includes an elemental metal.
11. The method of claim 1 , wherein the preformed metal substrate includes an alloy of different metals.
12. The method of claim 1 , further comprising forming an electrode electrically coupled to the first semiconductor material.
13. The method of claim 1 , further comprising using a portion of the preformed metal substrate to form an electrode lead electrically coupled to the first semiconductor material.
14. The method of claim 1 , further comprising bonding the preformed metal substrate to the metal bonding structure using a metal-metal bond.
15. The method of claim 14 , wherein the metal-metal bond includes a copper-copper bond.
16. The method of claim 14 , wherein the metal-metal bond includes a temporary liquid phase (“TLP”) bond.
17. A method of manufacturing a semiconductor wafer, the method comprising:
forming a metal bonding structure on a light emitting structure having a first semiconductor material, a second semiconductor material, and an active region between the first and second semiconductor materials;
bonding a preformed metal substrate to the metal bonding structure at a first temperature, wherein the preformed metal substrate has a thickness sufficient to inhibit bowing of the light emitting structure and is attached to a temporary carrier before being bonded to the metal bonding structure; and
debonding the preformed metal substrate and the temporary carrier at a second temperature, wherein the second temperature is higher than the second temperature.
18. The method of claim 17 , wherein the light emitting structure extends continuously over a surface of the preformed metal substrate.
19. The method of claim 17 , further comprising:
growing the light emitting structure on a growth substrate, and
after forming the metal bonding structure on the light emitting structure, removing the growth structure from the light emitting structure by at least one of grinding, post-grinding, wet etching, or dry etching.
20. The method of claim 17 , further comprising attaching the preformed metal substrate to a temporary carrier with an adhesive before bonding the preformed metal substrate to the metal bonding structure.