IP Library › Granted Patent US 10,741,720
Granted Patent B2
US 10,741,720 · App. 16/272,374 · Granted Aug 11, 2020

Plasmonic light emitting diode

Inventors: Yaojia Chen (Jersey City, NJ); Ning Li (White Plains, NY); Devendra K. Sadana (Pleasantville, NY); Jinghui Yang (Los Angeles, CA)
Assignee: International Business Machines Corporation
H01L33/06H01L33/0062H01L33/30H01L33/58H01L33/60B82Y10/00B82Y20/00B82Y30/00H01L33/64H01L2933/0058
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Quick Facts
Patent No.
US 10,741,720
App. No.
16/272,374
Granted
Aug 11, 2020
Kind
B2
Abstract

A light emitting diode includes a square quantum well structure, the quantum well structure including III-V materials. A dielectric layer is formed on the quantum well structure. A plasmonic metal is formed on the dielectric layer and is configured to excite surface plasmons in a waveguide mode that is independent of light wavelength generated by the quantum well structure to generate light.

Claims (27)

1. A light emitting diode, comprising:

a light emission structure having a contact; and

a plasmonic layer, including a plasmonic metal and a dielectric layer with a smooth interface therebetween, in contact with a contact of a quantum well structure and configured to excite surface plasmons in a waveguide mode using light generated by the light emission structure to enhance power input to the light emission structure.

2. The light emitting diode as recited in claim 1 , wherein the light emission structure includes a square with a side dimension of less than about 10 microns.

3. The light emitting diode as recited in claim 1 , wherein the plasmonic metal reduces light loss from the light emitting diode through reflection.

4. The light emitting diode as recited in claim 1 , wherein the plasmonic metal enhances emission intensity by a factor of about 2 over a same device without the plasmonic metal.

5. The light emitting diode as recited in claim 1 , wherein the plasmonic layer is configured to excite surface plasmons in a waveguide mode that is independent of wavelength generated by the light emission structure.

6. The light emitting diode as recited in claim 1 , wherein the dielectric layer includes aluminum oxide.

7. The light emitting diode as recited in claim 1 , wherein the light emission structure includes alternating layers of III-V materials.

8. The light emitting diode as recited in claim 7 , wherein the alternating layers include GaAs and AlGaAs materials.

9. A light emitting diode, comprising:

a substrate;

a light emission structure mounted on the substrate to generate light using optical pumping; and

a plasmonic layer, including a plasmonic metal and a dielectric layer with a smooth interface therebetween, the plasmonic layer located between the light emission structure and the substrate, and configured to excite surface plasmons in a waveguide mode.

10. The light emitting diode as recited in claim 9 , wherein the light emission structure includes a square with a side dimension of less than about 10 microns.

11. The light emitting diode as recited in claim 9 , wherein alternating layers include GaAs and AlGaAs materials.

12. The light emitting diode as recited in claim 9 , wherein the plasmonic metal reduces light loss from the light emitting diode through reflection.

13. The light emitting diode as recited in claim 9 , wherein the plasmonic metal enhances emission intensity by a factor of about 2 over a same device without the plasmonic metal.

14. The light emitting diode as recited in claim 9 , wherein the plasmonic layer is configured to excite surface plasmons in a waveguide mode that is independent of wavelength generated by the light emission structure.

15. The light emitting diode as recited in claim 9 , wherein the dielectric layer includes aluminum oxide.

16. A method for fabricating a light emitting diode, comprising:

forming a light emission structure on a contact; and

depositing a plasmonic layer, including a plasmonic metal and a dielectric layer, on the contact of the light emission structure, the plasmonic metal being configured to excite surface plasmons in a waveguide mode using light generated by the light emission structure to enhance power input to the light emission structure.

17. The method as recited in claim 16 , wherein the light emission structure includes a side dimension of less than about 10 microns.

18. The method as recited in claim 16 , further comprising reducing light loss from the light emitting diode using the plasmonic metal to reflect light.

19. The method as recited in claim 16 , wherein the plasmonic layer enhances emission intensity by a factor of about 2 over a same device without the plasmonic layer.

20. The method as recited in claim 16 , wherein the plasmonic metal is selected from the group consisting of Au, Cu, Ag and Al.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 11, 2019
From: CHEN, YAOJIA; LI, NING; SADANA, DEVENDRA K.; YANG, JINGHUI
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 048295/0015 →
Continuity (3)
Continuation 15887336 · Feb 2, 2018
Continuation 15266088 · Sep 15, 2016
Related Publication 20190189842A1 · Jun 20, 2019