IP Library Granted Patent US 11,325,828
Granted Patent B2
US 11,325,828 · App. 16/279,966 · Granted May 10, 2022

High-volume millimeter scale manufacturing

Inventors: Pratheev S. Sreetharan (Cambridge, MA); Andrew Baisch (Cambridge, MA); Alina Visco (Somerville, MA); Michael Karpelson (Newton, MA)
Assignee: Vibrant Composites Inc.
B81C1/00357B06B1/045B81C1/0019B81C1/00142B81C1/00428B81C1/00492B81C1/00547B06B1/10B81C2201/0102B81C2201/0135
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Quick Facts
Patent No.
US 11,325,828
App. No.
16/279,966
Granted
May 10, 2022
Kind
B2
Abstract

A method for manufacturing a millimeter scale electromechanical device includes coupling a stainless steel ply to a polymer carrier ply, coating the stainless steel ply in a photo resist material, masking the photoresist material, exposing the photoresist material to cure a portion of the photoresist material, developing the photoresist material to remove uncured photoresist material from the stainless steel ply, chemically etching the stainless steel ply to remove a patterned portion of the stainless steel ply, dissolving the polymer carrier ply to release unwanted chips of the stainless steel ply, and adhering the patterned stainless steel ply to a flexible material ply to form a sub-laminate.

Claims (24)

1. A high-speed method for forming a millimeter-scale linkage laminate structure comprising:

providing a first ply of relatively rigid mechanical material, said first ply having a first surface region and a second surface region disposed in substantially parallel spaced relation to said first surface region;

coupling said first surface region of said first ply to a second ply of sacrificial film carrier material;

applying a patterned photoresist material to said second surface region;

selectively etching said first ply to form at least one substrate island and at least one chip island, said substrate and chip islands being respectively coupled to said second ply of sacrificial film carrier material;

selectively coupling said at least one substrate island to a relatively flexible ply material to form said linkage laminate structure; and

removing said second ply of sacrificial film carrier material to release said linkage laminate structure from said sacrificial film carrier material and said at least one chip island.

2. A high-speed method as defined in claim 1 wherein said second ply of sacrificial film carrier material comprises a soluble film material and where said removing said second ply of sacrificial film carrier material comprises dissolving said sacrificial film carrier material.

3. A high-speed method as defined in claim 2 wherein said soluble film material comprises an isopropynol-soluble material.

4. A high-speed method as defined in claim 1 wherein said second ply of sacrificial film carrier material comprises a thermally decomposing film material and where said removing said second ply of sacrificial film carrier material comprises decomposing said sacrificial film carrier material.

5. A high-speed method as defined in claim 4 wherein said decomposing said sacrificial film carrier material comprises chemically decomposing said sacrificial film carrier material.

6. A high-speed method as defined in claim 4 wherein said decomposing said sacrificial film carrier material comprises evaporating said sacrificial film carrier material.

7. A high-speed method as defined in claim 1 wherein said second ply of sacrificial film carrier material comprises a melting film material and where said removing said second ply of sacrificial film carrier material comprises heating said sacrificial film carrier material.

8. A high-speed method as defined in claim 7 wherein said melting film material comprises a hot melt material.

9. A high-speed method as defined in claim 7 wherein said melting film material comprises a wax material.

10. A high-speed method as defined in claim 1 wherein said second ply of sacrificial film carrier material comprises a biodegradable film material.

11. A high-speed method as defined in claim 10 wherein said biodegradable film material comprises a biodegradable polyethylene terephthalate (PET) material.

12. A high-speed method as defined in claim 1 wherein said first ply of relatively rigid mechanical material comprises a metallic material.

13. A high-speed method as defined in claim 1 wherein said selectively etching said first ply comprises etching said first ply in a batch processing tank system.

14. A high-speed method as defined in claim 1 wherein said selectively coupling said at least one substrate island to a relatively flexible ply material comprises adhesive jet printing an adhesive material onto a surface region of said at least one substrate island and, thereafter, disposing said relatively flexible ply material into contact with said adhesive material.

15. A high-speed method as defined in claim 1 wherein said selectively coupling said at least one substrate island to a relatively flexible ply material comprises disposing a die cut adhesive film onto a surface region of said at least one substrate island and, thereafter, disposing said relatively flexible ply material into contact with said die cut adhesive film.

16. A high-speed method as defined in claim 1 wherein said selectively coupling said at least one substrate island to a relatively flexible ply material comprises adhesive transfer printing an adhesive material onto a surface region of said at least one substrate island and, thereafter, disposing said relatively flexible ply material into contact with said adhesive material.

17. A high-speed method as defined in claim 1 wherein said selectively coupling said at least one substrate island to a relatively flexible ply material comprises adhesive spraying an adhesive material onto a surface region of said at least one substrate island and, thereafter, disposing said relatively flexible ply material into contact with said adhesive material.

18. A high-speed method as defined in claim 1 wherein said selectively coupling said at least one substrate island to a relatively flexible ply material comprises screen printing an adhesive material onto a surface region of said at least one substrate island and, thereafter, disposing said relatively flexible ply material into contact with said adhesive material.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Feb 3, 2026
From: ARROWMARK AGENCY SERVICES LLC
To: STARRY, INC.; VIBRANT COMPOSITES INC.
Reel/Frame 073668/0040 →
SECURITY INTEREST Recorded Dec 15, 2022
From: STARRY, INC.; VIBRANT COMPOSITES INC.
To: ARROWMARK AGENCY SERVICES LLC, AS ADMINISTRATIVE AGENT
Reel/Frame 062111/0431 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2020
From: SREETHARAN, PRATHEEV S.; BAISCH, ANDREW; KARPELSON, MICHAEL; MAVIS (VISCO), ALINA
To: VIBRANT COMPOSITES INC.
Reel/Frame 052830/0625 →
Continuity (68)
Continuation PCTUS2017047869 · Aug 21, 2017
Continuation In Part 16173922 · Oct 29, 2018
Continuation PCTUS2017029975 · Apr 27, 2017
Continuation 16279966 · Feb 19, 2019
Continuation In Part 16173922
Continuation In Part 15242508 · Aug 20, 2016
Continuation In Part PCTUS2015015509 · Feb 11, 2015
Continuation In Part 16279966 · Feb 19, 2019
Continuation In Part 16173922
Continuation In Part 15242508
Continuation In Part PCTUS2016028185 · Feb 11, 2015
Continuation In Part PCTUS2016028185 · Apr 18, 2016
Continuation In Part 16279966 · Feb 19, 2019
Continuation In Part 16173922
Continuation PCTUS2017029975
Continuation In Part 15242508
Continuation In Part PCTUS2015015509 · Feb 11, 2015
Continuation In Part 15242508
Continuation In Part PCTUS2016028185
Continuation In Part 16279966 · Feb 19, 2019
Continuation In Part 16173922
Continuation PCTUS2017029975
Continuation In Part 15242508
Continuation In Part PCTUS2015015509
Continuation In Part 15242508
Continuation In Part PCTUS2016028185
Continuation In Part 15242508
Continuation In Part 16279966 · Feb 19, 2019
Continuation In Part 14834336 · Aug 24, 2015
Continuation In Part PCTUS2014018096 · Feb 24, 2014
Continuation In Part 16279966 · Feb 19, 2019
Continuation In Part 14834336
Continuation In Part 16279966 · Feb 19, 2019
Continuation In Part 15073436 · Mar 17, 2016
Continuation PCTUS2014056165 · Sep 17, 2014
Continuation 16279966 · Feb 19, 2019
Continuation In Part 15073436
Continuation In Part 14834336
Continuation In Part PCTUS2014018096
Continuation In Part 16279966 · Feb 19, 2019
Continuation In Part 15073436
Continuation In Part 14834336
Provisional Application 62381492 · Aug 30, 2016
Provisional Application 62377661 · Aug 21, 2016
Provisional Application 62377511 · Aug 19, 2016
Provisional Application 62328524 · Apr 27, 2016
Provisional Application 62289147 · Jan 29, 2016
Provisional Application 62180974 · Jun 17, 2015
Provisional Application 62148732 · Apr 16, 2015
Provisional Application 62051358 · Sep 17, 2014
Provisional Application 62051355 · Sep 17, 2014
Provisional Application 61955614 · Mar 19, 2014
Provisional Application 61938613 · Feb 11, 2014
Provisional Application 61933037 · Jan 29, 2014
Provisional Application 61933027 · Jan 29, 2014
Provisional Application 61930359 · Jan 22, 2014
Provisional Application 61930370 · Jan 22, 2014
Provisional Application 61878979 · Sep 17, 2013
Provisional Application 61821495 · May 9, 2013
Provisional Application 61788698 · Mar 15, 2013
Provisional Application 61775867 · Mar 11, 2013
Provisional Application 61775852 · Mar 11, 2013
Provisional Application 61772257 · Mar 4, 2013
Provisional Application 61772239 · Mar 4, 2013
Provisional Application 61771847 · Mar 2, 2013
Provisional Application 61768494 · Feb 24, 2013
Provisional Application 61768397 · Feb 22, 2013
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