IP Library Granted Patent US 10,928,248
Granted Patent B2
US 10,928,248 · App. 16/288,752 · Granted Feb 23, 2021

Light filter and spectrometer including the same

Inventors: Jineun Kim (Suwon-si, KR); Younggeun Roh (Seoul, KR); Yeonsang Park (Seoul, KR); Hyochul Kim (Yongin-si, KR); Moonil Jung (Suwon-si, KR)
Assignee: SAMSUNG ELECTRONICS CO., LTD.
G01J3/1895G01J3/021G01J3/0205G01J3/0256G01J3/0297G01J3/26G01J3/2823G01J3/45G02B5/201G02B5/28G02B5/288G01J2003/1226G01J2003/2826G02F2001/213H01L27/14621H01L31/02165
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Quick Facts
Patent No.
US 10,928,248
App. No.
16/288,752
Granted
Feb 23, 2021
Kind
B2
Abstract

A light filter and a spectrometer including the light filter are disclosed. The light filter includes a plurality of filter units having different resonance wavelengths, wherein each of the plurality of filter units includes a cavity layer configured to output light of constructive interference, a Bragg reflection layer provided on a first surface of the cavity layer, and a pattern reflection layer provided on a second surface of the cavity layer opposite to the first surface and configured to cause guided mode resonance of light incident on the pattern reflection layer, the pattern reflection layer including a plurality of reflection structures that are periodically arranged.

Claims (34)

1. A light filter comprising:

a plurality of filter units having different resonance wavelengths,

wherein each of the plurality of filter units comprises:

a cavity layer configured to output light of constructive interference;

a Bragg reflection layer provided on a first surface of the cavity layer; and

a pattern reflection layer provided on a second surface of the cavity layer opposite to the first surface and configured to cause guided mode resonance of light incident on the pattern reflection layer, the pattern reflection layer comprising a plurality of reflection structures that are periodically arranged,

wherein the pattern reflection layer further comprises a filling layer filled in gaps between the plurality of reflection structures, the filling layer being in contact with side surfaces of each of the plurality of reflection structures, and

wherein a refractive index of the filling layer is different from a refractive index of the plurality of reflection structures.

2. The light filter of claim 1 , wherein the plurality of reflection structures are periodically arranged with a pitch less than a resonance wavelength of each of the plurality of filter units.

3. The light filter of claim 1 , wherein a resonance wavelength of each of the plurality of filter units is determined by at least one of a pitch, a thickness, and a duty cycle of the plurality of reflection structures, the duty cycle of the plurality of reflection structures being a ratio between a width of each of the plurality of reflection structures and the pitch of each of the plurality of reflection structures.

4. The light filter of claim 1 , wherein the plurality of reflection structures are arranged one-dimensionally.

5. The light filter of claim 4 , wherein the plurality of reflection structures are arranged in parallel lines.

6. The light filter of claim 1 , wherein the plurality of reflection structures are arranged two-dimensionally.

7. The light filter of claim 6 , wherein the plurality of reflection structures are repeatedly arranged in a polygonal pattern.

8. The light filter of claim 1 , wherein the Bragg reflection layer comprises a plurality of material layers respectively having different refractive indexes that are alternately stacked.

9. The light filter of claim 1 , wherein the pattern reflection layer further comprises a plurality of connection layers configured to connect adjacent reflection structures, and

wherein a thickness of each of the plurality of connection layers is less than a thickness of the plurality of reflection structures.

10. A spectrometer comprising:

a light filter comprising a plurality of filter units, the plurality of filter units having different resonance wavelengths; and

a sensor configured to receive light that has passed through the light filter,

wherein each of the plurality of filter units comprises:

a cavity layer configured to output light of constructive interference;

a first Bragg reflection layer provided on a first surface of the cavity layer; and

a pattern reflection layer comprising a plurality of reflection structures that are provided on a second surface of the cavity layer opposite to the first surface or included in the cavity layer, the pattern reflection layer being configured to cause guided mode resonance of light incident on the pattern reflection layer,

wherein the plurality of reflection structures are provided on the second surface of the cavity layer,

wherein the pattern reflection layer further comprises a filling layer filled in gaps between the plurality of reflection structures, the filling layer being in contact with side surfaces of each of the plurality of reflection structures, and

wherein a refractive index of the filling layer is different from a refractive index of the plurality of reflection structures.

11. The spectrometer of claim 10 , wherein the plurality of reflection structures are periodically arranged with a pitch less than a resonance wavelength of each of the plurality of filter units.

12. The spectrometer of claim 10 , wherein a resonance wavelength of each of the plurality of filter units is determined by at least one of a pitch, a thickness, and a duty cycle of the plurality of reflection structures, the duty cycle of the plurality of reflection structures being a ratio between a width of each of the plurality of reflection structures and the pitch of each of the plurality of reflection structures.

13. The spectrometer of claim 10 , wherein the plurality of reflection structures are arranged one-dimensionally or two-dimensionally.

14. The spectrometer of claim 10 , wherein the plurality of reflection structures are provided in the cavity layer, and

wherein each of the plurality of filter units further comprises a second Bragg reflection layer provided on the second surface of the cavity layer.

15. The spectrometer of claim 14 , wherein the plurality of reflection structures are in contact with the first Bragg reflection layer and the second Bragg reflection layer.

16. The spectrometer of claim 10 , wherein the sensor comprises an image sensor or a photodiode.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 28, 2019
From: KIM, JINEUN; ROH, YOUNGGEUN; PARK, YEONSANG; KIM, HYOCHUL; JUNG, MOONIL
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 048470/0308 →
Priority Claims (2)
KR 10-2018-0028293 · Mar 9, 2018 · national
KR 10-2018-0133136 · Nov 1, 2018 · national
Continuity (1)
Related Publication 20190277693A1 · Sep 12, 2019
Cited By (1)
US 12,359,969