Integrated structures
View Patent ↗Some embodiments include an integrated structure having a conductive material, a select device gate material over the conductive material, and vertically-stacked conductive levels over the select device gate material. Vertically-extending monolithic channel material is adjacent the select device gate material and the conductive levels. The monolithic channel material contains a lower segment adjacent the select device gate material and an upper segment adjacent the conductive levels. A first vertically-extending region is between the lower segment of the monolithic channel material and the select device gate material. The first vertically-extending region contains a first material. A second vertically-extending region is between the upper segment of the monolithic channel material and the conductive levels. The second vertically-extending region contains a material which is different in composition from the first material.
1. An integrated structure, comprising:
a conductive structure;
a select device gate material over the conductive structure and vertically spaced from the conductive structure;
conductive levels over the select device gate material;
monolithic channel material adjacent the select device gate material and the conductive levels; the monolithic channel material containing a lower segment adjacent the select device gate material and an upper segment adjacent the conductive levels; the monolithic channel material being electrically coupled with the conductive structure;
a first region between the lower segment of the monolithic channel material and the select device gate material; the first region comprising a first material;
a second region between the upper segment of the monolithic channel material and the conductive levels; the second region comprising a second material which is different in composition from the first material; and
wherein the monolithic channel material is spaced from the conductive structure by a conductive plug; the conductive plug directly contacting both the conductive structure and the monolithic channel material; the monolithic channel material comprising a first composition, and the conductive plug comprising a second composition different from said first composition.
2. The integrated structure of claim 1 wherein the second material comprises one or more charge-trapping substances.
3. The integrated structure of claim 1 wherein the first material is an oxide and the second material is a nitride.
4. The integrated structure of claim 1 wherein the first material is silicon dioxide, and wherein the second region includes silicon nitride, aluminum oxide and silicon dioxide.
5. The integrated structure of claim 1 wherein the first composition comprises silicon and the second composition comprises germanium.
6. The integrated structure of claim 1 wherein the first composition consists of silicon and the second composition comprises germanium.
7. The integrated structure of claim 1 wherein the conductive structure is over one or more integrated circuit structures.
8. The integrated structure of claim 1 wherein the conductive structure includes two or more different conductive materials.
9. The integrated structure of claim 8 wherein said two or more different conductive materials include a metal silicide and a metal.
10. The integrated structure of claim 8 wherein said two or more different conductive materials include a metal silicide and a conductively-doped semiconductor material.
11. An integrated structure, comprising:
a metal-containing conductive structure supported by a semiconductor substrate;
two or more select devices over the metal-containing conductive structure;
vertically-stacked conductive levels over the select devices;
monolithic channel material containing a lower segment adjacent the select devices and an upper segment adjacent the conductive levels; the monolithic channel material being electrically coupled with the metal-containing conductive structure;
a first region between the lower segment of the monolithic channel material and gates of the select devices; the first region comprising a first material;
a second region between the upper segment of the monolithic channel material and the conductive levels; the second region comprising a second material which is different in composition from the first material; and
wherein the monolithic channel material is spaced from the metal-containing conductive structure by a conductive plug; wherein the monolithic channel material comprises a first composition, wherein the conductive plug comprises a second composition which is different from said first composition.
12. The integrated structure of claim 11 wherein the first material is an oxide, and wherein the second material is a nitride.
13. The integrated structure of claim 11 wherein at least two of said two or more select devices are electrically coupled to one another and electrically operated as a common unit.
14. The integrated structure of claim 11 wherein at least two of said two or more select devices are electrically operated independently of one another.
15. The integrated structure of claim 11 wherein the metal-containing conductive structure is over one or more integrated circuit structures.