Memory having a continuous channel
The present disclosure includes memory having a continuous channel, and methods of processing the same. A number of embodiments include forming a vertical stack having memory cells connected in series between a source select gate and a drain select gate, wherein forming the vertical stack includes forming a continuous channel for the source select gate, the memory cells, and the drain select gate, and removing a portion of the continuous channel for the drain select gate such that the continuous channel is thinner for the drain select gate than for the memory cells and the source select gate.
1. An apparatus, comprising:
memory cells connected in series between a source select gate and a drain select gate and including a control gate material and a continuous oxide material;
a hollow continuous channel for the source select gate, the memory cells, and the drain select gate, wherein a portion of the hollow continuous channel for the drain select gate is thinner than a portion of the hollow continuous channel for the memory cells;
a charge storage structure material that is adjacent the portion of the hollow continuous channel for the memory cells, adjacent only a single side of the control gate material of the memory cells, and adjacent only two opposite sides of the continuous oxide material, wherein no portion of the charge storage structure material is adjacent the portion of the hollow continuous channel for the drain select gate, no portion of the charge storage structure material extends over any other side of the control gate material, and no portion of the charge storage structure material is adjacent any other side of the continuous oxide material;
a first material within the hollow continuous channel and adjacent the portion of the hollow continuous channel for the memory cells; and
a second material within the hollow continuous channel on top of the first material and adjacent the portion of the hollow continuous channel for the drain select gate, wherein the second material is an insulator material that is a different material than the first material.
2. The apparatus of claim 1 , wherein the portion of the hollow continuous channel for the drain select gate comprises a wall of the hollow continuous channel for the drain select gate.
3. The apparatus of claim 1 , wherein the portion of the hollow continuous channel for the memory cells comprises a wall of the hollow continuous channel for the memory cells.
4. The apparatus of claim 1 , wherein the hollow continuous channel comprises a hollow p-type material.
5. The apparatus of claim 1 , wherein the portion of the hollow continuous channel for the drain select gate is thinner than a portion of the hollow continuous channel for the source select gate.
6. A method of processing memory, comprising:
forming a vertical stack having memory cells connected in series between a source select gate and a drain select gate and including a control gate material and a continuous oxide material;
wherein forming the vertical stack includes:
forming a hollow continuous channel for the source select gate, the memory cells, and the drain select gate such that a portion of the hollow continuous channel for the drain select gate is thinner than a portion of the hollow continuous channel for the source select gate;
forming a charge storage structure material that is adjacent a portion of the hollow continuous channel for the memory cells, adjacent only a single side of the control gate material of the memory cells, and adjacent only two opposite sides of the continuous oxide material, wherein no portion of the charge storage structure material is adjacent the portion of the hollow continuous channel for the drain select gate and the portion of the hollow continuous channel for the source select gate, no portion of the charge storage structure material extends over any other side of the control gate material, and no portion of the charge storage structure material is adjacent any other side of the continuous oxide material;
filling the hollow continuous channel with a first material such that the first material is within the hollow continuous channel and adjacent the portion of the hollow continuous channel for the source select gate; and
filling the hollow continuous channel with a second material such that the second material is within the hollow continuous channel on top of the first material and adjacent the portion of the hollow continuous channel for the drain select gate, wherein the second material is an insulator material that is a different material than the first material.
7. The method of claim 6 , wherein the method includes forming the hollow continuous channel such that the portion of the hollow continuous channel for the drain select gate is thinner than the portion of the hollow continuous channel for the memory cells.