Semiconductor device having a stack body including metal films and first insulating films alternately stacked on a semiconductor substrate and including a stepped end portion and manufacturing method thereof
A semiconductor device according to one embodiment includes a semiconductor substrate, a stack body including metal films and first insulating films alternately stacked on the semiconductor substrate and including a stepped end portion, conducting films respectively protruding from the metal films on all steps of the end portion, contact portions respectively provided above the conducting films, a second insulating film surrounding side surfaces of the contact portions, and a barrier metal film provided between the second insulating film and the contact portions and between the conducting films and the contact portions. The entire top surfaces of the conducting films are covered by the barrier metal film and the second insulating film.
1. A semiconductor device comprising:
a semiconductor substrate;
a stack body including metal films and first insulating films alternately stacked on the semiconductor substrate and including a stepped end portion;
conducting films respectively protruding from the metal films on all steps of the end portion;
contact portions respectively provided above the conducting films;
a second insulting film surrounding side surfaces of the contact portions; and
a barrier metal film provided between the second insulating film and the contact portions and between the conducting films and the contact portions, wherein
entire top surfaces of the conducting films are covered by the barrier metal film and the second insulating film, and
each of the conducting films have a thickness equal to or smaller than a half of a thickness of the first insulating films, and
in the end portion, an upper layer of each of all steps is the first insulating film, and
depths of the contact portions are different one another, and
the conducting film is provided below a bottom surface of each contact portion.
2. The semiconductor device according to claim 1 , wherein a material of the conducting films and a material of the contact portions are same as material included in the metal films.
3. The semiconductor device according to claim 2 , wherein the metal includes at least one of tungsten (W), cobalt (Co), nickel (Ni), and molybdenum (Mo).
4. A manufacturing method of a semiconductor device, the method comprising:
forming contact holes respectively reaching metal films on corresponding steps on a stepped end portion of a stack body in which metal films and first insulating films are alternately stacked on a semiconductor substrate;
forming conducting films on the metal films exposed from the contact holes, respectively;
forming a second insulting film on inner surfaces of the contact holes and top surfaces of the conducting films;
forming a barrier metal film in the contact holes, the barrier metal film covering the second insulating film and covering the entire top surfaces of the conducting films along with the second insulating film; and
forming contact portions in the contact holes, respectively, the contact portions being electrically connected to the conducting films via the barrier metal film wherein
each of the conducting films have a thickness equal to or smaller than a half of a thickness of the first insulating films, and
in the end portion, an upper layer of each of all steps is the first insulating film, and
depths of the contact portions are different one another, and
the conducting film is provided below a bottom surface of each contact portion.
5. The manufacturing method of the semiconductor device according to claim 4 , comprising forming the conducting films and the contact portions by metal included in the metal films.
6. The manufacturing method of the semiconductor device according to claim 5 , wherein the metal includes at least one of tungsten (W), cobalt (Co), nickel (Ni), and molybdenum (Mo).