Break filter using a silicon carbide porous body and manufacturing method of the break filter
A silicon carbide porous body includes a skeletal structure formed by a plurality of silicon carbide particles bonded to each other, a plurality of pores formed by the skeletal structure, neck parts formed by surface-contacting of adjacent silicon carbide particles, and an average pore size is larger than 3 μm and equal to or smaller than 9 μm, and a porosity ranges from 35% to 55%. A break filter using the silicon carbide porous body enables high performance of collection of particles, prevention of soaring up of particles, and shortening of a restoration time from the depressurized state of the chamber to the atmospheric state.
1. A break filter, comprising a silicon carbide porous body comprising:
a skeletal structure formed by a plurality of silicon carbide particles bonded to each other;
a plurality of pores formed by the skeletal structure; and
neck parts formed by surface-contacting of adjacent silicon carbide particles,
wherein
an average pore size is larger than 3 μm and equal to or smaller than 9 μm and
a porosity of the silicon carbide porous body ranges from 35% to 55%,
wherein the break filter is placed at a gas inlet of a semiconductor processing apparatus.
2. A method of manufacturing a break filter comprising a filter element made by forming a silicon carbide porous body to a disk shape, a casing made of passivation-treated stainless steel that covers a first side of the filter element and is provided with a gas inlet for introducing gas on the first side of the filter element, and a ring made of passivation-treated stainless steel that supports a periphery of a second side of the filter element and is fitted in the casing,
the silicon carbide porous body comprising:
a skeletal structure formed by a plurality of silicon carbide particles bonded to each other;
a plurality of pores formed by the skeletal structure; and
neck parts formed by surface-contacting of adjacent silicon carbide particles, wherein
an average pore size is larger than 3 μm and equal to or smaller than 9 μm and
a porosity of the silicon carbide porous body ranges from 35% to 55%,
the method comprising steps of:
cooling the ring;
housing the filter element in the cooled ring; and
integrating the ring to which the filter element is housed into the casing by cool-fitting.