Semiconductor device with released source and drain
Embodiments are generally directed to a semiconductor device with released source and drain. An embodiment of a method includes etching a buffer layer of a semiconductor device to form a gate trench under a gate channel portion of a channel layer of the device; filling the gate trench with an oxide material to form an oxide isolation layer; etching one or more source/drain contact trenches in an interlayer dielectric (ILD) layer for source and drain regions of the device; etching the oxide isolation layer within the one or more source/drain contact trenches to form one or more cavities under a source/drain channel in the source and drain regions, wherein the etching of each contact trench is to expose all sides of the source/drain channel; and depositing contact metal in the one or more contact trenches, including depositing the contact metal in the cavities under the source/drain channel.
1. A semiconductor device comprising:
a gate channel below a gate contact for the device;
a source/drain channel below source/drain portions of the device; and
one or more metal contacts surrounding the source/drain channel;
wherein the one or more metal contacts are formed surrounding the source/drain channel in one or more cavities etched around the source/drain channel.
2. The device of claim 1 , wherein the one or more metal contacts are wrap around contacts for the source/drain channel that provide contact with all sides of the source/drain.
3. The device of claim 1 , further comprising a buffer layer formed below the gate channel and the source/drain channel.
4. The device of claim 3 , wherein the buffer layer is a first III-V semiconductor material and the channel layer is a second III-V semiconductor material.
5. The device of claim 4 , wherein the channel layer comprises indium gallium arsenide (InGaAs).
6. The device of claim 4 , wherein the buffer layer comprises gallium arsenide (GaAs).
7. The device of claim 1 , wherein the semiconductor device is one of a trigate transistor or a nanowire device.
8. A system comprising:
one or more processors to process data;
a transmitter or receiver and antenna for transmission or reception of data; and
one or more semiconductor devices, a first semiconductor device including:
a gate channel below a gate contact for the device;
a source/drain channel below source/drain portions of the device; and
one or more metal contacts surrounding the source/drain channel;
wherein the one or more metal contacts are formed around the source/drain channel in one or more cavities etched around the source/drain channel.
9. The system of claim 8 , wherein the one or more metal contacts are wrap around contacts for the source/drain channel that provide contact with all sides of the source/drain of the first semiconductor device.
10. The system of claim 8 , wherein the first semiconductor device is one of a trigate transistor or a nanowire device.