Laser reflow apparatus
A laser reflow apparatus capable of reducing tact time for a single bonding object, and accelerating an overall bonding process for all of a plurality of bonding objects is provided. The laser reflow apparatus comprises a bonding object transfer unit including a stage, a laser emission unit, a beam transmission plate, and a beam transmission plate transfer unit.
1. A laser reflow apparatus, comprising:
a bonding object transfer unit configured to transfer a bonding object, the bonding object transfer unit comprising a stage for supporting the bonding object;
a laser emission unit configured to emit laser to the bonding object by converting the laser to the form of a surface light source and a laser emission transfer unit configured to transfer the laser emission unit to an emission position or a stand-by position;
a beam transmission plate configured to apply pressure to the bonding object, the beam transmission plate being independently and separately mounted from the laser emission unit and being made of a material transmitting a laser beam in the form of a surface light source, and a beam transmission plate transfer unit configured to transfer the beam transmission plate to an operation position or a stand-by position; and
a protective film transfer unit configured to transfer, underneath the beam transmission plate, a protective film for preventing fumes generated during laser bonding from sticking to a bottom surface of the beam transmission plate.
2. The laser reflow apparatus according to claim 1 , wherein the beam transmission plate transfer unit further comprises:
at least one actuator configured to apply pressure to the beam transmission plate; and
at least one pressure sensor configured to sense the pressure applied to the beam transmission plate by the actuator.
3. The laser reflow apparatus according to claim 2 , wherein the beam transmission plate transfer unit further comprises at least one height sensor configured to sense a height of the beam transmission plate.
4. The laser reflow apparatus according to claim 1 , characterized in that the beam transmission plate comprises a base material selected from the group consisting of quartz, sapphire, fused silica glass, and diamond.
5. The laser reflow apparatus according to claim 4 , characterized in that the beam transmission plate comprises a thin film coating formed on a bottom surface thereof.
6. A laser reflow apparatus, comprising:
a bonding object transfer unit configured to transfer a bonding object, the bonding object transfer unit comprising a stage for supporting the bonding object;
a laser emission unit configured to emit laser to the bonding object by converting the laser to the form of a surface light source and a laser emission transfer unit configured to transfer the laser emission unit to an emission position or a stand-by position; and
a beam transmission plate configured to apply pressure to the bonding object, the beam transmission plate being independently and separately mounted from the laser emission unit and being made of a material transmitting a laser beam in the form of a surface light source, and a beam transmission plate transfer unit configured to transfer the beam transmission plate to an operation position or a stand-by position,
wherein the beam transmission plate comprises a passage on a bottom surface thereof, through which fumes generated during laser bonding are discharged outwards.
7. The laser reflow apparatus according to claim 6 , further comprising:
a protective film transfer unit configured to transfer, underneath the beam transmission plate, a protective film for preventing the fumes generated during the laser bonding from sticking to the bottom surface of the beam transmission plate.