Deep junction electronic device and process for manufacturing thereof
Disclosed is a process for manufacturing a deep junction electronic device including steps of: b) Depositing a layer of non-monocrystalline semiconductor material on a plane surface of a substrate of a monocrystalline semiconductor material; c) Incorporating inactivated dopant elements prior to step b) into said substrate ( 1 ) and/or, respectively, during or after step b) into said layer, so as to form an inactivated doped layer; d) Exposing, an external surface of the layer formed at step b) to a laser thermal anneal beam, so as to melt said layer down to the substrate and so as to activate said dopant elements incorporated at step c); e) Stopping exposure to the laser beam so as to induce epi-like crystallization of the melted layer, so that said substrate and/or, respectively, an epi-like monocrystalline semiconductor material, comprises a layer of activated doped monocrystalline semiconductor material.
1. Process for manufacturing a deep junction electronic device comprising the steps of:
a) Providing a substrate ( 1 ) of a monocrystalline semiconductor material, said substrate having a plane surface ( 9 );
b) Depositing a layer ( 5 ) of non monocrystalline semiconductor material on said plane surface ( 9 ), said layer ( 5 ) of non monocrystalline semiconductor material having an external surface ( 19 );
c) Incorporating inactivated dopant elements prior to step b) into said substrate ( 1 ) and/or, respectively, during or after step b) into said layer ( 5 ) of non monocrystalline semiconductor material, so as to form an inactivated doped layer ( 27 ) of monocrystalline semiconductor material and/or, respectively, an inactivated doped layer ( 7 ) of non monocrystalline semiconductor material;
d) Exposing, after the step c), an area of said external surface ( 19 ) formed at step b) to a laser thermal anneal beam ( 30 ) having a density of energy higher than a determined threshold, so as to melt the layer ( 5 ) of non monocrystalline semiconductor material within a volume defined by said laser thermal anneal beam down to an interface with the substrate ( 1 ), and so as to activate said dopant elements incorporated at step c);
e) Stopping exposure of said area to said laser thermal anneal beam so as to induce epi-like crystallization of said layer ( 5 ) of non monocrystalline semiconductor material from said interface ( 6 , 8 ) with the substrate ( 1 ) and formation of epi-like monocrystalline semiconductor material ( 15 ) extending over said volume between said interface and said external surface ( 19 ), wherein said substrate ( 1 ) and/or, respectively, said epi-like monocrystalline semiconductor material ( 15 ), comprises a layer ( 17 , 27 ) of activated doped monocrystalline semiconductor material.
2. Process for manufacturing a deep junction electronic device according to claim 1 wherein during step d) said laser beam ( 30 ) is an excimer laser beam having a laser wavelength in the range of absorption of said non monocrystalline semiconductor material.
3. Process for manufacturing a deep junction electronic device according to claim 2 further comprising another step of cleaning said surface ( 9 ) of the substrate ( 1 ) prior to step b), so as to remove any oxide layer from said surface ( 9 ).
4. Process for manufacturing a deep junction electronic device according to claim 1 wherein the step c) comprises a step c1) which is performed after step a) and prior to step b), said step c1) comprising exposure of said surface ( 9 ) of the substrate ( 1 ) to an ion implantation beam ( 40 ) so as to implant said inactivated dopant elements into the monocrystalline semiconductor substrate ( 1 ) and to form a layer ( 27 ) of monocrystalline semiconductor material doped by said inactivated dopant elements and extending from said plane surface ( 9 ) into the monocrystalline semiconductor substrate ( 1 ).
5. Process for manufacturing a deep junction electronic device according to claim 4 wherein the step c) comprises a step c2) which is performed during step b), said step c2) comprising the incorporation of dopant elements into the layer ( 5 ) of non monocrystalline semiconductor material.
6. Process for manufacturing a deep junction electronic device according to claim 5 wherein the layer ( 37 ) of activated doped monocrystalline semiconductor is doped with a first dopant type and the layer ( 17 ) of activated doped epi-like monocrystalline semiconductor is doped with a second dopant type.
7. Process for manufacturing a deep junction electronic device according to claim 5 further comprising another step of cleaning said surface ( 9 ) of the substrate ( 1 ) prior to step b), so as to remove any oxide layer from said surface ( 9 ).
8. Process for manufacturing a deep junction electronic device according to claim 4 wherein the step c) comprises a step c3) which is performed after the steps a) and b), said step c3) comprising exposure of said layer ( 5 ) of non monocrystalline semiconductor material to an ion implantation beam ( 40 ) so as to implant said inactivated dopant elements into the layer ( 5 ) of non monocrystalline semiconductor material and to form a layer ( 7 ) of non monocrystalline semiconductor material doped by said inactivated dopant elements.
9. Process for manufacturing a deep junction electronic device according to claim 8 wherein the layer ( 37 ) of activated doped monocrystalline semiconductor is doped with a first dopant type and the layer ( 17 ) of activated doped epi-like monocrystalline semiconductor is doped with a second dopant type.
10. Process for manufacturing a deep junction electronic device according to claim 4 further comprising another step of cleaning said surface ( 9 ) of the substrate ( 1 ) prior to step b), so as to remove any oxide layer from said surface ( 9 ).
11. Process for manufacturing a deep junction electronic device according to claim 1 further comprising another step of cleaning said surface ( 9 ) of the substrate ( 1 ) prior to step b), so as to remove any oxide layer from said surface ( 9 ).
12. Process for manufacturing a deep junction electronic device according to claim 1 wherein the semiconductor material is selected among silicon and germanium.
13. Process according to f claim 1 wherein said step c) of incorporating inactivated dopant elements is achieved so as to incorporate dopant elements with a gradient profile along a direction transverse to the plane surface ( 9 ) of the substrate ( 1 ).
14. Process for manufacturing a deep junction electronic device according to claim 1 wherein the layer ( 15 ) of epi-like monocrystalline semiconductor material has a thickness comprised between 500 nanometers and 3 micrometers.
15. Process for manufacturing a deep junction electronic device according to claim 1 wherein at step d) said laser beam is an excimer laser beam having an energy density in the range from 0.1 to 10 J/cm 2 and a laser wavelength lower than 600 nanometers.
16. Process for manufacturing a deep junction electronic device according to claim 1 wherein said steps d) and e) are performed in a gaseous atmosphere selected among an inert gas, air or vacuum and under controlled pressure and temperature.
17. Process for manufacturing a deep junction electronic device according to claim 1 further comprising a step of measuring an optical beam reflected on the external surface of the layer ( 5 ) of non monocrystalline semiconductor material so as to control full melt of said layer ( 5 ) of non monocrystalline semiconductor material during said step d), and so as to control epi-like crystallization of said layer ( 15 ) during said step e).
18. Process for manufacturing a deep junction electronic device according to claim 1 wherein the step c) comprises a step c3) which is performed after the steps a) and b), said step c3) comprising exposure of said layer ( 5 ) of non monocrystalline semiconductor material to an ion implantation beam ( 40 ) so as to implant said inactivated dopant elements into the layer ( 5 ) of non monocrystalline semiconductor material and to form a layer ( 7 ) of non monocrystalline semiconductor material doped by said inactivated dopant elements.
19. Process for manufacturing a deep junction electronic device according to claim 1 wherein the step c) comprises a step c2) which is performed during step b), said step c2) comprising the incorporation of dopant elements into the layer ( 5 ) of non monocrystalline semiconductor material.
20. Deep junction electronic device comprising a monocrystalline semiconductor substrate ( 1 ), said deep junction electronic device comprises a layer ( 15 ) of epi-like monocrystalline semiconductor material ( 15 ) having an external surface ( 19 ) and an interface ( 6 , 8 ) with said monocrystalline semiconductor substrate ( 1 ), and wherein said monocrystalline semiconductor substrate ( 1 ), and/or, respectively, said layer ( 15 ) of epi-like monocrystalline semiconductor material ( 15 ), comprises a layer ( 17 , 27 ) of activated doped monocrystalline semiconductor material, wherein said interface ( 6 , 8 ) is located at a depth comprised between 1 and 5 micrometers from said external surface, and wherein the doping profile of said layer ( 17 , 27 ) of activated doped monocrystalline semiconductor material is a non-Gaussian profile.