Charged particle beam apparatus
In order to provide a charged particle beam apparatus capable of stably detecting secondary particles and electromagnetic waves even for a non-conductive sample under high vacuum environment and enabling excellent observation and analysis, the charged particle beam apparatus includes a charged particle gun ( 12 ), scanning deflectors ( 17 and 18 ) configured to scan a charged particle beam ( 20 ) emitted from the charged particle gun ( 12 ) onto a sample ( 21 ), detectors ( 40 and 41 ) configured to detect a scanning control voltage input from an outside into the scanning deflectors, an arithmetic unit ( 42 ) configured to calculate, based on the detected scanning control voltage, irradiation pixel coordinates for the charged particle beam; and an irradiation controller ( 45 ) configured to control irradiation of the sample with the charged particle beam according to the irradiation pixel coordinates.
1. A charged particle beam apparatus comprising:
a charged particle gun;
a scanning deflector configured to scan a charged particle beam emitted from the charged particle gun onto a sample;
a scanning control voltage generator for generating a scanning control voltage to be input to the scanning deflector;
a detector configured to detect an external scanning control voltage, which is input from an outside into the scanning deflector and is different from the scanning control voltage;
an arithmetic unit configured to calculate, based on the detected external scanning control voltage, irradiation pixel coordinates for the charged particle beam;
an irradiation controller configured to control irradiation of the sample with the charged particle beam according to the irradiation pixel coordinates.
2. The charged particle beam apparatus of claim 1 , further comprising:
a secondary particle detector configured to detect secondary particles released from the sample by irradiation with the charged particle beam;
a signal processor configured to perform imaging for secondary particle data output from the secondary particle detector according to the irradiation pixel coordinates; and
an image display unit configured to display a secondary particle image imaged by the signal processor.
3. The charged particle beam apparatus of claim 2 , wherein
the irradiation controller controls an irradiation time, an interval time between irradiations, and the number of pixels between irradiations.
4. The charged particle beam apparatus of claim 1 , wherein
the irradiation controller controls an irradiation time, an interval time between irradiations, and the number of pixels between irradiations.
5. The charged particle beam apparatus of claim 1 , wherein
the charged particle beam apparatus is mounted with an energy dispersive X-ray analyzer, a backscattering electron diffractometer, or a superconducting transition-edge sensor type X-ray microcalorimeter which includes the scanning control voltage generator.
6. The charged particle beam apparatus of claim 1 , wherein
the charged particle beam apparatus includes a blanker, and
the irradiation controller controls ON/OFF of irradiation from the charged particle gun onto the sample with the charged particle beam through the blanker.
7. The charged particle beam apparatus of claim 1 , wherein
the charged particle gun is an optically-excited charged particle gun, and
the irradiation controller controls an excitation light controller of the optically-excited charged particle gun, thereby controlling ON/OFF of irradiation from the optically-excited charged particle gun onto the sample with the charged particle beam.