Semiconductor laser diode
A semiconductor laser diode includes a semiconductor body having an emitter region; and a first connection element that electrically contacts the semiconductor body in the emitter region, wherein the semiconductor body is in contact with the first connection element in the emitter region, and at least in places in the emitter region, the semiconductor body has a structuring that enlarges a contact area between the semiconductor body and the first connection element.
1. A semiconductor laser diode comprising:
a semiconductor body having an emitter region; and
a first connection element that electrically contacts the semiconductor body in the emitter region, the first connection element comprises a metallic layer,
wherein
the semiconductor body is in contact with the first connection element in the emitter region,
at least in places in the emitter region, the semiconductor body has a structuring that enlarges a contact area between the semiconductor body and the first connection element,
the structuring has a density of structures and the density of the structures increases toward a radiation exit surface,
the structuring comprises a plurality of structures, and
the closer the structures are to the radiation exit surface, the smaller a distance (d) is between neighboring structures.
2. The semiconductor laser diode according to claim 1 , wherein
the structuring has a density of structures, wherein the density of the structures increases towards a radiation exit surface,
the semiconductor body comprises a subregion arranged laterally adjacent to the emitter region,
at least in places in the subregion, the semiconductor body has a further structuring comprising further structures, wherein the further structuring is configured to weaken secondary modes, and
the structures of the structuring have a mean height (h) that is smaller than a mean height (h) of the further structures of the further structuring.
3. The semiconductor laser diode according to claim 2 , wherein the further structures are etched.
4. The semiconductor laser diode according to claim 1 , wherein at least in places, the contact area having the structuring located between the semiconductor body and the first connection element is at least 1.5 times as large as a contact area free of any structuring and located between the semiconductor body and the connection element.
5. The semiconductor laser diode according to claim 1 , wherein the connection layer comprising the metallic layer completely covers the semiconductor body in the emitter region.
6. The semiconductor laser diode according to claim 1 , wherein at least in places, the structuring comprises at least one structure selected from the group consisting of truncated cone, inverse truncated cone, truncated pyramid, inverse truncated pyramid, cone, inverse cone, pyramid, inverse pyramid, spherical shell and inverse spherical shell.
7. The semiconductor laser diode according to claim 1 , wherein a maximum lateral extension of each of the structures is at least 400 nm.
8. The semiconductor laser diode according to claim 1 , wherein, in the emitter region, the semiconductor body comprises a connection region directly adjoining the first connection element at the contact area, and the connection region is not completely pierced at any point.
9. The semiconductor laser diode according to claim 1 , wherein the semiconductor body comprises a subregion arranged laterally adjacent to the emitter region, and at least in places in the subregion, the semiconductor body has a further structuring comprising further structures, said further structuring being configured to weaken secondary modes.
10. The semiconductor laser diode according to claim 9 , wherein an electrically insulating insulation element is arranged between the subregion and the first connection element and in the subregion completely covers the semiconductor body on its side facing the first connection element.
11. The semiconductor laser diode according to claim 9 , wherein the structures of the structuring have a mean height (h) that is smaller than a mean height (h) of the further structures of the further structuring.
12. The semiconductor laser diode according to claim 1 , wherein the structures are etched.
13. A semiconductor laser diode comprising:
a semiconductor body having an emitter region; and
a first connection element that electrically contacts the semiconductor body in the emitter region, the first connection element comprises a metallic layer,
wherein
the semiconductor body is in contact with the first connection element in the emitter region,
at least in places in the emitter region, the semiconductor body has a structuring that enlarges a contact area between the semiconductor body and the first connection element, and
the structuring has a density of structures and the density of the structures increases toward a radiation exit surface.