Dilute chemical solution producing apparatus and dilute chemical solution producing method
A dilute chemical solution producing apparatus includes, in a supply line of ultrapure water, a platinum group metal carrying resin column, a membrane-type deaeration apparatus, and a gas dissolving membrane apparatus, and a washing chemical solution injection apparatus is provided between the platinum group metal carrying resin column and the membrane-type deaeration apparatus. An inert gas source is connected to a gas phase side of the membrane-type deaeration apparatus, and an inert gas source is also connected to a gas phase side of the gas dissolving membrane apparatus. A discharge line communicates with the gas dissolving membrane apparatus. With such a dilute chemical solution producing apparatus, a dilute chemical solution with both dissolved oxygen and dissolved hydrogen peroxide being removed can be safely produced and supplied in a washing step for semiconductor washing.
1. A dilute chemical solution producing apparatus for diluting a chemical solution with ultrapure water, sequentially comprising, in an ultrapure water supply line, a platinum group metal carrying resin column and a membrane-type deaeration apparatus, a chemical solution injection apparatus being provided between the platinum group metal carrying resin column and the membrane-type deaeration apparatus.
2. The dilute chemical solution producing apparatus according to claim 1 , wherein an inert gas dissolving membrane apparatus is provided downstream of the membrane-type deaeration apparatus.
3. The dilute chemical solution producing apparatus according to claim 1 , wherein the membrane-type deaeration apparatus is of an inert gas suction type.
4. A dilute chemical solution producing method for diluting a chemical solution with ultrapure water, wherein the ultrapure water for dilution is passed through a platinum group metal carrying resin column, then a chemical solution component is added to prepare a dilute chemical solution, and then the obtained dilute chemical solution is deaerated.
5. The dilute chemical solution producing method according to claim 4 , wherein an inert gas is dissolved in the deaerated dilute chemical solution.
6. The dilute chemical solution producing method according to claim 4 , wherein the deaeration is performed while an inert gas is sucked into a gas phase side.