Tension mask frame assembly manufacturing apparatus and method
Disclosed is a tension mask frame assembly manufacturing apparatus for mounting a tension mask on a rectangular frame having: a pair of support frame parts to which mutually facing edges of a tension mask having a rectangular sheet shape are fixed; and a pair of connection frame parts for mutually connecting both ends of the support frame parts. The manufacturing apparatus comprises: a frame loading unit for loading the tension mask frame assembly; a pressing unit for pressing the support frame parts along the direction of the plate surfaces of support frames between both ends thereof; and a control unit for controlling the pressing unit so as to pre-deform the support frames in correspondence to at least a part of the bending deformation amount of the support frame parts according to the weight of the support frame parts and the tension of the tension mask.
1. A linear source vertical vacuum deposition apparatus for manufacturing a tension mask-frame assembly in which a tension mask is mounted on a frame which has a rectangular frame shape and includes a pair of support frames, to which opposite edges of the tension mask with a rectangular sheet shape are fixed, and a pair of connection frames configured to connect both ends of the support frames to each other, the apparatus comprising:
a frame loading unit configured to load a tension mask-frame assembly;
a pressing unit configured to press the support frame between both ends thereof in a plate surface direction of the support frame;
a load cell configured to measure a force applied to the support frame; and
a control unit configured to control the pressing unit to pre-deform the support frame in accordance with at least a portion of a bending deformation amount of the support frame, caused by own weight of the support frame and tension of the tension mask,
wherein the pressing unit includes a plurality of inward pressing members which are spaced apart from each other in a lengthwise direction of the pair of support frames and press the pair of support frames toward the inside of the frame, and
wherein the pressing unit includes a plurality of outward pressing members which are spaced apart from each other in a lengthwise direction of the support frame and press the support frame toward the outside of the frame.
2. The apparatus of claim 1 , wherein the control unit controls the pressing member based on a predicted own weight deformation amount of each of the pair of the support frames and a tension deformation amount of the tension mask.
3. The apparatus of claim 1 , wherein the control unit controls the pressing member based on a predicted own weight deformation amount of each of the pair of the support frames and a tension deformation amount of the tension mask.
4. A method of manufacturing a tension mask-frame assembly in which a tension mask is mounted on a frame which has rectangular frame shape and includes a pair of support frames, to which opposite edges of the tension mask with a rectangular sheet shape are fixed, and a pair of connection frames configured to connect both ends of the support frames to each other, the method comprising:
loading the frame on a frame loading unit;
measuring a force applied to the support frame via a load cell;
pre-deforming the support frame in accordance with at least a portion of a bending deformation amount of the support frame, caused by own weight of the support frame and tension of the tension mask;
clamping the tension mask on the pre-deformed frame;
tensioning the tension mask;
fixing the tensioned tension mask to the pre-deformed frame;
pressing the pair of support frames toward the inside of the frame via a plurality of inward pressing members which are spaced apart from each other in a lengthwise direction; and
pressing the support frame toward the outside of the frame via a plurality of outward pressing members Which are spaced apart from each other in a lengthwise direction.