Method for cleaning a vacuum system used in the manufacture of OLED devices, method for vacuum deposition on a substrate to manufacture OLED devices, and apparatus for vacuum deposition on a substrate to manufacture OLED devices
The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.
1. A method for cleaning a vacuum system used in the manufacture of OLEO devices, comprising:
performing pre-cleaning for cleaning at least a portion of a vacuum system, wherein the pre-cleaning includes a wet chemical cleaning process; and
performing plasma cleaning using a remote plasma source, the plasma cleaning performed after the pre-cleaning.
2. The method of claim 1 , wherein the plasma cleaning is a final cleaning procedure before operating the vacuum system.
3. The method of claim 1 , wherein the plasma cleaning includes a cleaning of a vacuum chamber.
4. The method of claim 3 , wherein the plasma cleaning includes a cleaning of one or more inner wads of the vacuum chamber.
5. The method of claim 1 , wherein the plasma cleaning includes a cleaning of components inside a vacuum chamber of the vacuum system.
6. The method of claim 5 , wherein the components are selected from the group consisting of mechanical components, moveable components, drives, valves, and any combination thereof.
7. The method of claim 1 , wherein the plasma cleaning includes a cleaning of one or more mask devices used during a deposition process.
8. The method of claim 1 , wherein the method is performed after a maintenance procedure of the vacuum system or portions of the vacuum system.
9. The method of claim 1 , wherein the plasma cleaning is performed in one or more chambers of the vacuum system selected from the group consisting of a load lock chamber, a cleaning chamber, a vacuum deposition chamber, a vacuum processing chamber, a transfer chamber, a routing module; and any combination thereof.
10. The method of claim 1 , wherein the plasma cleaning uses a plasma of pure oxygen or oxygen mixtures with nitrogen or argon.
11. The method of claim 1 , wherein the pre-cleaning is performed under atmosphere and the plasma cleaning is performed under vacuum.
12. The method of claim 1 , wherein the pre-cleaning and the plasma cleaning are performed in the same chamber.
13. The method of claim 1 , wherein the vacuum chamber has a pressure in the vacuum chamber of about 0.1 mbar to about 5 mbar during the plasma cleaning.
14. A method for vacuum deposition on a substrate to manufacture OLED devices, comprising:
performing pre-cleaning for cleaning at least a portion of a vacuum system, wherein the pre-cleaning includes a wet chemical cleaning process;
performing plasma cleaning using a remote plasma source for cleaning at least the portion of the vacuum system, the plasma cleaning performed after the pre-cleaning, and
depositing one or more layers of an organic material on a substrate.
15. The method of claim 14 , wherein the plasma cleaning uses a plasma of pure oxygen or oxygen mixtures with nitrogen or argon.
16. The method of claim 14 , wherein the pre-cleaning is performed under atmosphere and the plasma cleaning is performed under vacuum.
17. The method of claim 16 , further comprising reducing pressure after pre-cleaning to wherein the plasma cleaning is performed at a pressure of about 10 −5 mbar to about 10 −8 mbar, wherein reducing the pressure is performed before the plasma cleaning.
18. The method of claim 14 , wherein the plasma cleaning uses pure oxygen.
19. The method of claim 14 , wherein the plasma cleaning uses a mixture of (1) oxygen and (2) nitrogen or argon.
20. An apparatus for vacuum deposition on a substrate to manufacture OLED devices, comprising:
a vacuum chamber;
a remote plasma source connected to the vacuum chamber; and
a controller connected to the remote plasma source for performing plasma cleaning as a final cleaning procedure,
wherein the controller is configured to implement a method for cleaning a vacuum system used in the manufacture of OLED devices, comprising:
performing pre-cleaning for cleaning at least a portion of the vacuum system, wherein the pre-cleaning includes a wet chemical cleaning process; and
performing plasma cleaning using a remote plasma source.