IP Library Granted Patent US 10,822,689
Granted Patent B2
US 10,822,689 · App. 16/333,695 · Granted Nov 3, 2020

Patterning of nanoporous gold microstructures

Inventors: Wei-Chuan Shih (Houston, TX); Fusheng Zhao (Houston, TX); Jingting Li (Houston, TX)
Assignee: UNIVERSITY OF HOUSTON SYSTEM
C23C14/34C23C14/56C23C14/586C23C14/5813B82Y40/00
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Quick Facts
Patent No.
US 10,822,689
App. No.
16/333,695
Granted
Nov 3, 2020
Kind
B2
Abstract

A nanoporous metal can be formed by projecting laser patterns using a spatial light modulator (SLM) onto a gold/silver alloy film immersed in diluted nitric acid solutions. Heat accumulation induced by the photothermal effect enables localized dealloying in dilute nitric acid. NPG micropatterns can be formed at the irradiated spots while the surrounding alloy remains intact.

Claims (25)

1. A method for forming a nanoporous metal, comprising:

providing a substrate;

evaporating chromium onto the substrate to form a chromium layer;

evaporating gold onto the chromium layer to form a gold adhesion layer;

sputtering a layer of a noble metal alloy on the gold to form a sample;

immersing the sample in an acid solution;

placing the sample in the acid solution on a microscope; and

irradiating a projected laser pattern on the alloy layer.

2. The method of claim 1 wherein the irradiating occurs for 5 to 20 seconds.

3. The method of claim 1 further comprising

performing a phase modulation and producing a desired pattern using a continuous wave laser beam incident on a spatial light modulator, wherein a modulated beam is fed through a back port of an inverted microscope to form a laser pattern.

4. The method of claim 1 wherein the noble metal alloy is comprised of a first noble metal and a second noble metal selected from the group consisting of ruthenium, rhodium, palladium, silver, osmium, iridium, platinum, gold, mercury, rhenium, and copper, wherein the first noble metal and the second noble metal are not the same noble metal.

5. The method of claim 1 wherein the noble metal alloy is comprised of gold and silver.

6. The method of claim 1 wherein the acid in the acid solution is nitric acid.

7. The method of claim 1 wherein the concentration of acid in the acid solution is equal or less than 3.65 M.

8. The method of claim 1 wherein the thickness of the chromium layer is 2-5 nm.

9. The method of claim 1 wherein the thickness of the gold adhesion layer is 5-50 nm.

10. The method of claim 1 wherein the thickness of the alloy layer is 20-100 nm.

11. The method of claim 1 wherein the substrate is made of one selected from the group consisting of glass, plastics, optical fiber, and a combination thereof.

12. The method of claim 1 wherein the substrate is selected from the group consisting of curved, microscopic, non-rigid, and a combination thereof.

13. The method of claim 1 wherein the substrate is selected from the group consisting of medical catheter, medical implant, capillary tube, and contact lenses.

14. The method of claim 1 wherein the nanoporous metal is a nanoporous gold microstructure.

15. The method of claim 14 wherein the nanoporous metal is utilized in a microfluidic device.

16. The method of claim 15 wherein the microfluidic device is a biosensor or photothermal activators.

17. The method of claim 16 wherein the nanoporous gold microstructure occurs after a bonding step of the microfluidic device.

Assignments (2)
CONFIRMATORY LICENSE Recorded Mar 3, 2025
From: UNIVERSITY OF HOUSTON
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 070767/0720 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2019
From: SHIH, WEI-CHUAN; ZHAO, FUSHENG; LI, JINGTING
To: UNIVERSITY OF HOUSTON SYSTEM
Reel/Frame 048608/0563 →
Continuity (2)
Provisional Application 62394842 · Sep 15, 2016
Related Publication 20200017954A1 · Jan 16, 2020