IP Library Granted Patent US 10,872,872
Granted Patent B2
US 10,872,872 · App. 16/347,188 · Granted Dec 22, 2020

Package substrate with high-density interconnect layer having pillar and via connections for fan out scaling

Inventors: Robert Alan May (Chandler, AZ); Sri Ranga Sai Boyapati (Chandler, AZ); Kristof Kuwawi Darmawikarta (Chandler, AZ); Srinivas V. Pietambaram (Chandler, AZ); Javier Soto Gonzalez (Chandler, AZ); Kwangmo Chris Lim (Seoul, KR); Aleksandar Aleksov (Chandler, AZ)
Assignee: Intel Corporation
H01L24/24H01L21/4857H01L23/13H01L23/49816H01L23/49822H01L23/522H01L23/5226H01L25/0652H01L2224/24226
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Quick Facts
Patent No.
US 10,872,872
App. No.
16/347,188
Granted
Dec 22, 2020
Kind
B2
Abstract

Integrated circuit package substrates with high-density interconnect architecture for scaling high-density routing, as well as related structures, devices, and methods, are generally presented. More specifically, integrated circuit package substrates with fan out routing based on a high-density interconnect layer that may include pillars and vias, and integrated cavities for die attachment are presented. Additionally, integrated circuit package substrates with self-aligned pillars and vias formed on the high-density interconnect layer as well as related methods are presented.

Claims (39)

1. An integrated circuit package, comprising:

a package substrate having a first face and an opposing second face, wherein the package substrate includes a plurality of layers;

a high-density interconnect layer having a first side and an opposing second side, wherein the high-density interconnect layer is an individual layer of the plurality of layers of the package substrate, wherein an input/output (I/O) of the high-density interconnect layer is between 100 and 1000 I/O/mm/layer, wherein the high-density interconnect layer is at the first face of the package substrate, and wherein the high-density interconnect layer includes:

a plurality of pillars formed on the first side of the high-density interconnect layer, wherein a bump pitch of the plurality of pillars is between 10 μm and 80 μm; and

a via formed on the second side of the high-density interconnect layer, wherein a next individual layer of the plurality of layers of the package substrate is electrically coupled to the via; and

a first die, wherein the first die is electrically coupled to the package substrate via the pillar on the high-density interconnect layer.

2. The integrated circuit package of claim 1 , wherein the first die is electrically coupled to the pillar.

3. The integrated circuit package of claim 1 , wherein the package substrate is electrically coupled to the via.

4. The integrated circuit package of claim 1 , further comprising:

a cavity formed on the package substrate.

5. The integrated circuit package of claim 4 , further comprising:

a second die in the cavity formed on the package substrate, wherein the second die is conductively connected to the package substrate.

6. The integrated circuit package of claim 5 , further comprising:

a third die in the cavity formed on the package substrate, wherein the third die is conductively connected to the second die.

7. The integrated circuit package of claim 1 , wherein an input/output (I/O) of an individual layer of the plurality of layers of the package substrate, that is not the high-density interconnect layer, is between 15 and 60 I/O/mm/layer.

8. A computing device, comprising:

a circuit board; and

an integrated circuit package coupled to the circuit board, wherein the integrated circuit package comprises:

a package substrate having a first face and an opposing second face, wherein the package substrate includes a plurality of layers;

a high-density interconnect layer having a first side and an opposing second side, wherein the high-density interconnect layer is an individual layer of the plurality of layers of the package substrate, wherein an input/output (I/O) of the high-density interconnect layer is between 100 and 1000 I/O/mm/layer, wherein the high-density interconnect layer is at the first face of the package substrate, and wherein the high-density interconnect layer includes:

a plurality of pillars formed on the first side of the high-density interconnect layer, wherein a bump pitch of the plurality of pillars is between 10 μm and 80 μm; and

a via formed on the second side of the high-density interconnect layer, wherein a next individual layer of the plurality of layers of the package substrate is electrically coupled to the via;

a first die, wherein the first die is electrically coupled to the package substrate via one or more of the plurality of pillars on the high-density interconnect layer.

9. The computing device of claim 8 , wherein the first die is electrically coupled to the one or more of the plurality of pillars.

10. The computing device of claim 8 , wherein the package substrate is electrically coupled to the via.

11. The computing device of claim 8 , further comprising:

a cavity formed on the package substrate.

12. The computing device of claim 11 , further comprising:

a second die in the cavity formed on the package substrate, wherein the second die is conductively connected to the package substrate.

13. The computing device of claim 12 , further comprising:

a third die in the cavity formed on the package substrate, wherein the third die is conductively connected to the second die.

14. An integrated circuit assembly, comprising:

a package substrate having a first face and an opposing second face, wherein the package substrate includes a plurality of layers; and

a high-density interconnect layer having a first side and an opposing second side, wherein the high-density interconnect layer is an individual layer of the plurality of layers of the package substrate, wherein an input/output (I/O) of the high-density interconnect layer is between 100 and 1000 I/O/mm/layer, wherein the high-density interconnect layer is at the first face of the package substrate, and wherein the high-density interconnect layer includes:

a plurality of pillars formed on the first side of the high-density interconnect layer, wherein a bump pitch of the plurality of pillars is between 10 μm and 80 μm; and

a via formed on the second side of the high-density interconnect layer, wherein a next individual layer of the plurality of layers of the package substrate is electrically coupled to the via.

15. The integrated circuit assembly of claim 14 , wherein an I/O of the next individual layer of the plurality of layers of the package substrate is between 15 and 60 I/O/mm/layer.

16. The integrated circuit assembly of claim 14 , wherein the first face of the package substrate is an active side and the second face of the package substrate is a back side, and wherein the back side has a bump pitch between 200 um and 1000 um.

17. The integrated circuit assembly of claim 14 , wherein the high-density interconnect layer further includes a pad formed on the second side of the high-density interconnect layer and the pad has a pad size between 1 um and 24 um.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 18, 2025
From: INTEL CORPORATION
To: SK HYNIX NAND PRODUCT SOLUTIONS CORP. (DBA SOLIDIGM)
Reel/Frame 072890/0093 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 2, 2019
From: MAY, ROBERT ALAN; BOYAPATI, SRI RANGA SAI; DARMAWIKARTA, KRISTOF KUWAWI; PIETAMBARAM, SRINIVAS V.; GONZALEZ, JAVIER SOTO; LIM, KWANGMO CHRIS; ALEKSOV, ALEKSANDAR
To: INTEL CORPORATION
Reel/Frame 049068/0502 →
Continuity (1)
Related Publication 20190363063A1 · Nov 28, 2019
Cited By (3)
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