Deposition mask package and deposition mask packaging method

1. A deposition mask package comprising:

a receiving portion;

a lid portion that faces the receiving portion;

a deposition mask that is arranged between the receiving portion and the lid portion and has an effective region in which a plurality of through-holes is formed,

wherein the receiving portion has a first opposing surface facing the lid portion and a concave portion provided on the first opposing surface,

the concave portion is covered with a first flexible film,

the effective region of the deposition mask is arranged on the concave portion with the first flexible film interposed therebetween,

wherein ends on both sides in a first direction of the deposition mask are arranged on the first opposing surface of the receiving portion, and

wherein a dimension of the concave portion in a second direction orthogonal to the first direction is larger than a dimension of the deposition mask in the second direction.

2. The deposition mask package according to claim 1 , wherein an interposed sheet is interposed between the deposition mask and the first flexible film, and

a dimension of the interposed sheet in a second direction orthogonal to the first direction is smaller than a dimension of the concave portion in the second direction.

3. The deposition mask package according to claim 1 , wherein the first flexible film is a PET film.

4. The deposition mask package according to claim 1 , wherein the first flexible film is antistatic-coated.

5. The deposition mask package according to claim 1 , wherein a second flexible film is interposed between the lid portion and the deposition mask.

6. The deposition mask package according to claim 1 , wherein the receiving portion and the lid portion are connected via a hinge portion.

7. The deposition mask package according to claim 1 , further comprising a sealing bag that seals the receiving portion and the lid portion.

8. The deposition mask package according to claim 1 , further comprising an impact sensor that detects an impact applied to the deposition mask.

9. A deposition mask package comprising:

a receiving portion;

a lid portion that faces the receiving portion; and

a deposition mask stacked body arranged between the receiving portion and the lid portion,

wherein the deposition mask stacked body includes:

a deposition mask having a first surface, a second surface positioned opposite to the first surface, and a plurality of through-holes extending from the first surface to the second surface; and

a plurality of interposed sheets stacked on the first surface and the second surface of the deposition mask, and

a difference between a thermal expansion coefficient of the deposition mask and the thermal expansion coefficient of the interposed sheet is 7 ppm/° C. or less.

10. The deposition mask package according to claim 9 , wherein the interposed sheet has a dimension that enables a circumferential edge of the interposed sheet to protrude from the deposition mask over an entire circumference as viewed along a stacking direction of the deposition mask.

11. The deposition mask package according to claim 9 , wherein the deposition mask and the interposed sheet are formed using an iron alloy containing nickel in an amount of 30% by mass to 54% by mass.

12. The deposition mask package according to claim 9 , wherein the deposition mask and the interposed sheet are formed using an iron alloy containing chromium.

13. The deposition mask package according to claim 9 , wherein a material forming the interposed sheet is identical to a material forming the deposition mask.

14. The deposition mask package according to claim 9 , wherein a thickness of the interposed sheet is 20 μm to 100 μm.

15. The deposition mask package according to claim 9 , wherein the thickness of the deposition mask is 15 μm or more.

16. The deposition mask package according to claim 9 , wherein

the receiving portion has a first opposing surface facing the lid portion and a concave portion provided on the first opposing surface,

ends on both sides in a first direction of the deposition mask are arranged on the first opposing surface of the receiving portion,

a dimension of the interposed sheet in a second direction orthogonal to the first direction is smaller than a dimension of the concave portion in the second direction.