Bevel etch profile control
Methods for processing a substrate, such as bevel etch processing, are provided. In one embodiment, a method includes placing a substrate on a cover plate inside of a processing chamber, where the substrate has a center and a bevel edge and contains a dielectric layer thereon, the processing chamber contains a mask disposed above the substrate and an edge ring disposed under the substrate, the edge ring has an annular body, and the cover plate is disposed on a support assembly. The method further includes heating the substrate with a heater attached to the support assembly, raising the edge ring to contact the mask, flowing a process gas containing an etchant along an outer surface of the mask and to the bevel edge, where the process gas is ignited to produce a plasma, and exposing an upper surface of the substrate at the bevel edge to the process gas.
1. A method comprising:
placing a substrate on a cover plate inside of a processing chamber, wherein the substrate has a center and a bevel edge and comprises a dielectric layer thereon, wherein the processing chamber comprises a mask disposed above the substrate and an edge ring disposed under the substrate, wherein the edge ring has an annular body, and wherein the cover plate is disposed on a support assembly within the processing chamber;
heating the substrate with a heater attached to the support assembly;
raising the edge ring and contacting the mask with the edge ring;
flowing a process gas comprising an etchant along an outer surface of the mask and to the bevel edge, wherein the process gas is ignited to produce a plasma; and
exposing an upper surface of the substrate at the bevel edge to the process gas.
2. The method of claim 1 , wherein the heater is embedded within the support assembly.
3. The method of claim 1 , wherein the support assembly comprises a vacuum chuck, an electrostatic chuck, or a heated pedestal.
4. The method of claim 1 , further comprising flowing a purge gas from at least one hole positioned on an inner surface of the mask to the center of the substrate and adjacent a top of the substrate.
5. The method of claim 4 , wherein the at least one hole is two or more holes positioned on the inner surface of the mask.
6. The method of claim 1 , wherein the cover plate comprises scalloped edges, a central aperture, and a plurality of openings surrounding the central aperture.
7. The method of claim 1 , wherein the substrate and the mask are separated by a distance of less than 100 mil.
8. A method comprising:
placing a substrate on a cover plate inside of a processing chamber, wherein the substrate has a center and a bevel edge and comprises a dielectric layer thereon, wherein the processing chamber comprises a mask disposed above the substrate and an edge ring disposed under the substrate; and wherein the cover plate is disposed on a support assembly within the processing chamber;
raising the edge ring and contacting the mask with the edge ring;
flowing a process gas comprising an etchant along an outer surface of the mask and to the bevel edge, wherein the process gas is ignited to produce a plasma; and
exposing an upper surface of the substrate at the bevel edge to the process gas.
9. The method of claim 8 , further comprising heating the substrate with a heater attached to the support assembly.
10. The method of claim 9 , wherein the heater is embedded within the support assembly.
11. The method of claim 8 , wherein the support assembly comprises a vacuum chuck, an electrostatic chuck, or a heated pedestal.
12. The method of claim 8 , further comprising flowing a purge gas from at least one hole positioned on an inner surface of the mask to the center of the substrate and adjacent a top of the substrate.
13. The method of claim 12 , wherein the at least one hole is two or more holes positioned on the inner surface of the mask.
14. The method of claim 8 , wherein the cover plate comprises scalloped edges, a central aperture, and a plurality of openings surrounding the central aperture.
15. The method of claim 8 , wherein the substrate and the mask are separated by a distance of less than 100 mil.
16. A method comprising:
placing a substrate on a cover plate inside of a processing chamber, the substrate having a center and a bevel edge and comprising a dielectric layer thereon, the processing chamber comprising a mask disposed above the substrate and an edge ring disposed under the substrate, wherein the cover plate is disposed on a support assembly within the processing chamber;
heating the substrate with a heater attached to the support assembly;
raising the edge ring and contacting the mask with the edge ring;
flowing a process gas along an outer surface of the mask and to the bevel edge, wherein the process gas comprises N 2 , O 2 , NF 3 , Ar, He, or any combination thereof, and wherein the process gas is ignited to produce a plasma; and
exposing an upper surface of the substrate at the bevel edge to the process gas and etching the dielectric layer.
17. The method of claim 16 , wherein the heater is embedded within the support assembly.
18. The method of claim 16 , wherein the support assembly comprises a vacuum chuck, an electrostatic chuck, or a heated pedestal.
19. The method of claim 16 , further comprising flowing a purge gas from at least one hole positioned on an inner surface of the mask to the center of the substrate and adjacent a top of the substrate.
20. The method of claim 19 , wherein the at least one hole is two or more holes positioned on the inner surface of the mask.