Array of cross point memory cells and methods of forming an array of cross point memory cells
View Patent ↗A method of forming an array of cross point memory cells comprises using two, and only two, masking steps to collectively pattern within the array spaced lower first lines, spaced upper second lines which cross the first lines, and individual programmable devices between the first lines and the second lines where such cross that have an upwardly open generally U-shape vertical cross-section of programmable material laterally between immediately adjacent of the first lines beneath individual of the upper second lines. Arrays of cross point memory cells independent of method of manufacture are disclosed.
1. An array of cross point memory cells comprising:
spaced lower first lines, spaced upper second lines which cross the first lines, and an individual memory cell between the first lines and the second lines where such cross, the individual memory cells comprising:
a select device and a programmable device in series with each other, the select device being electrically coupled to one of the second lines, the programmable device being electrically coupled to the select device and one of the first lines, the select device comprising an upwardly open generally U-shape of select device material in a vertical cross-section along its overlying second line; and
the programmable device comprising:
a first electrode electrically coupled to one of the first lines;
programmable material laterally aside the first electrode and the one first line; and
a second electrode laterally aside the programmable material and electrically coupled to the select device.
2. The array of claim 1 wherein the first electrode is part of the one first line wherein no portion thereof projects laterally relative to the one first line.
3. The array of claim 1 wherein individual ones of the generally U-shaped select device material are shared by two different immediately adjacent memory cells along said overlying second line.
4. The array of claim 3 wherein laterally outer sidewalls of the individual ones of the generally U-shaped select device material are aside and directly against the programmable material of said two immediately adjacent memory cells.
5. The array of claim 3 comprising a shared electrode within the individual ones of the generally U-shaped select device material that is electrically coupled with said overlying second line and shared by said two immediately adjacent memory cells.
6. The array of claim 5 wherein the shared electrode does not comprise an upwardly open generally U-shape in the vertical cross-section.
7. The array of claim 5 wherein the shared electrode comprises an upwardly open generally U-shape in the vertical cross-section.
8. The array of claim 3 wherein the individual ones of the generally U-shaped select device material contain two non-shared electrodes that are each electrically coupled with said overlying second line.
9. The array of claim 1 wherein the programmable material comprises an upwardly open generally U-shape in the vertical cross-section, individual ones of the generally U-shaped select device material being laterally within individual ones of the generally U-shaped programmable material.
10. The array of claim 1 wherein the second electrode is directly against an elevationally innermost surface of the generally U-shaped select device material in the vertical cross-section.
11. The array of claim 1 wherein the select device material is not generally U-shaped in any vertical cross-section parallel its immediately adjacent first lines.
12. An array of cross point memory cells comprising:
spaced lower first lines, spaced upper second lines which cross the first lines, and an individual memory cell between the first lines and the second lines where such cross, the individual memory cells comprising:
a select device and a programmable device in series with each other, the select device being electrically coupled to one of the second lines, the programmable device being electrically coupled to the select device and one of the first lines; and
the programmable device comprising:
a first electrode electrically coupled to one of the first lines;
programmable material laterally aside the first electrode and the one first line, the programmable material being laterally between the one first line and a first line immediately adjacent thereto and comprising an upwardly open generally U-shape in a vertical cross-section along its overlying second line; and
a second electrode laterally aside the programmable material and electrically coupled to the select device.