Magnetoresistance effect device with shaped high-frequency signal line overlapping magnetoresistance effect element
Provided is a magnetoresistance effect device comprising a magnetoresistance effect element including a first ferromagnetic layer, a second ferromagnetic layer and a spacer layer, and a high-frequency signal line. The high-frequency signal line includes an overlapping part disposed at a position overlapping the magnetoresistance effect element and a non-overlapping part disposed at a position not overlapping the magnetoresistance effect element in a plan view from a stacking direction. At least a part of the non-overlapping part is disposed below the overlapping part in the stacking direction, assuming that the overlapping part is above the magnetoresistance effect element in the stacking direction.
1. A magnetoresistance effect device comprising:
a magnetoresistance effect element including a first ferromagnetic layer, a second ferromagnetic layer and a spacer layer; and
a high-frequency signal line,
wherein in the magnetoresistance effect element, the first ferromagnetic layer, the second ferromagnetic layer, and the spacer layer are stacked along a stacking direction such that the spacer layer is disposed between the first ferromagnetic layer and the second ferromagnetic layer,
the high-frequency signal line includes an overlapping part disposed at a position overlapping the magnetoresistance effect element and a non-overlapping part disposed at a position not overlapping the magnetoresistance effect element in a plan view from the stacking direction,
the non-overlapping part comprises at least one first part extending in a direction parallel to the overlapping part and at least one second part connecting the at least one first part and the overlapping part,
the at least one second part comprises an inclined part inclined to both the stacking direction and the at least one first part,
at least a part of the inclined part is disposed below the overlapping part in the stacking direction, assuming that the overlapping part is above the magnetoresistance effect element in the stacking direction, and
the overlapping part is disposed apart from the magnetoresistance effect element with an insulator therebetween.
2. The magnetoresistance effect device according to claim 1 , wherein at least a part of the non-overlapping part disposed below the overlapping part in the stacking direction is disposed at the same position as the first ferromagnetic layer in the stacking direction.
3. A magnetoresistance effect device comprising:
a magnetoresistance effect element including a first ferromagnetic layer, a second ferromagnetic layer and a spacer layer; and
a high-frequency signal line,
wherein in the magnetoresistance effect element, the first ferromagnetic layer, the second ferromagnetic layer, and the spacer layer are stacked along a stacking direction such that the spacer layer is disposed between the first ferromagnetic layer and the second ferromagnetic layer,
the high-frequency signal line includes an overlapping part disposed at a position overlapping the magnetoresistance effect element and a non-overlapping part disposed at a position not overlapping the magnetoresistance effect element in a plan view from the stacking direction,
the non-overlapping part comprises at least one first part with a thickness in the stacking direction larger than that of the overlapping part and at least one second part connecting the at least one first part and the overlapping part,
the at least one second part comprises a third part with a thickness between the thickness of the at least one first part and a thickness of the overlapping part in the stacking direction,
at least a part of the third part is disposed below the overlapping part in the stacking direction, assuming that the overlapping part is above the magnetoresistance effect element in the stacking direction, and
the overlapping part is disposed apart from the magnetoresistance effect element with an insulator therebetween.