IP Library Granted Patent US 12,347,784
Granted Patent B2
US 12,347,784 · App. 16/365,811 · Granted Jul 1, 2025

Interposer with step feature

Inventors: Florence Pon (Folsom, CA); Yi Xu (Folsom, CA)
Assignee: SK Hynix NAND Product Solutions Corp.
H01L23/5386H01L21/486H01L23/5384H01L25/0657H01L25/50H01L2225/06548H01L2225/06562
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Quick Facts
Patent No.
US 12,347,784
App. No.
16/365,811
Granted
Jul 1, 2025
Kind
B2
Abstract

Embodiments of the present disclosure may generally relate to systems, apparatus, and/or processes directed to an interposer with step features used to electrically couple stacked dies. In embodiments, the step features may appear as a ziggurat shape to one or more sides of the interposer, which may be referred to as a ziggurat interposer. The interposer may have electrical routing disposed within to electrically couple the first face of the one of the step features with a die.

Claims (45)

1. An interposer apparatus comprising:

a first side;

a second side adjacent to and substantially perpendicular to a first plane of the first side, wherein the second side includes a plurality of step features that include: a first face in a second plane substantially parallel to the first plane of the first side, a second face with a third plane substantially perpendicular to the first plane of the first face, and wherein the first face and the second face meet to form a step feature;

wherein the first face of a first step feature of the plurality of step features is to couple with a first die;

wherein the first face of a second step feature of the plurality of step features is to couple with a second die;

a first electrical connector to couple to the first die, the first electrical connector in the interposer apparatus;

a second electrical connector to couple to the second die, the second electrical connector in the interposer apparatus; and

electrical routing disposed in the interposer apparatus to electrically couple the first electrical connector directly to the second electrical connector within the interposer apparatus.

2. The interposer apparatus of claim 1 , wherein the first and second electrical connectors include copper vias.

3. The interposer apparatus of claim 1 , wherein the electrical routing includes one or more copper vias.

4. The interposer apparatus of claim 3 , wherein the copper vias are in silicon.

5. The interposer apparatus of claim 1 , wherein the first side is a top side or a bottom side.

6. The interposer apparatus of claim 1 , wherein the first face and the second face identify a portion of a silicon layer of the apparatus.

7. The interposer apparatus of claim 1 , wherein the electrical routing is to couple with a voltage source or a ground.

8. The interposer apparatus of claim 1 , wherein the plurality of step features form a ziggurat shape.

9. A system, comprising:

a first die and a second die;

an interposer comprising:

a first side;

a second side adjacent to and substantially perpendicular to a first plane of the first side, wherein the second side includes a plurality of step features that include: a first face in a second plane substantially parallel to the first plane of the first side, a second face with a third plane substantially perpendicular to the first plane of the first face, and wherein the first face and the second face meet to form a step feature;

wherein the first face of a first step feature of the plurality of step features is coupled to the first die;

wherein the first face of a second step feature of the plurality of step features is coupled to the second die;

a first electrical connector coupled to the first die, the first electrical connector in the interposer;

a second electrical connector coupled to the second die, the second electrical connector in the interposer; and

electrical routing disposed in the apparatus and electrically coupling the first electrical connector directly to the second electrical connector within the apparatus; and

wherein the plurality of step features form a ziggurat shape.

10. The system of claim 9 , wherein the electrical routing includes one or more copper vias.

11. The system of claim 9 , wherein the electrical routing is to couple with a voltage source or a ground.

12. The system of claim 9 , further comprising a substrate, wherein the interposer is to electrically couple with the substrate.

13. An interposer apparatus comprising:

a first side;

a second side adjacent to and substantially perpendicular to a first plane of the first side, wherein the second side includes a plurality of step features that include: a first face in a second plane substantially parallel to the first plane of the first side, a second face with a third plane substantially perpendicular to the first plane of the first face, and wherein the first face and the second face meet to form a step feature;

wherein the first face of a first step feature of the plurality of step features is to couple with a first die;

wherein the first face of a second step feature of the plurality of step features is to couple with a second die;

a first electrical connector to couple to the first die, the first electrical connector in the interposer apparatus;

a second electrical connector to couple to the second die, the second electrical connector in the interposer apparatus; and

electrical routing disposed in the interposer apparatus to electrically couple the first electrical connector directly to the second electrical connector within the interposer apparatus, wherein the electrical routing includes one or more copper vias, and wherein the copper vias are in silicon.

14. An interposer apparatus comprising:

a first side;

a second side adjacent to and substantially perpendicular to a first plane of the first side, wherein the second side includes a plurality of step features that include: a first face in a second plane substantially parallel to the first plane of the first side, a second face with a third plane substantially perpendicular to the first plane of the first face, and wherein the first face and the second face meet to form a step feature, wherein the first face and the second face identify a portion of a silicon layer of the apparatus;

wherein the first face of a first step feature of the plurality of step features is to couple with a first die;

wherein the first face of a second step feature of the plurality of step features is to couple with a second die;

a first electrical connector to couple to the first die, the first electrical connector in the interposer apparatus;

a second electrical connector to couple to the second die, the second electrical connector in the interposer apparatus; and

electrical routing disposed in the interposer apparatus to electrically couple the first electrical connector directly to the second electrical connector within the interposer apparatus.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 11, 2025
From: INTEL CORPORATION
To: SK HYNIX NAND PRODUCT SOLUTIONS CORP. (DBA SOLIDIGM)
Reel/Frame 072549/0289 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 23, 2020
From: PON, FLORENCE; XU, YI
To: INTEL CORPORATION
Reel/Frame 052481/0704 →
Continuity (1)
Related Publication 20200312769A1 · Oct 1, 2020
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