Methods of sealing openings, and methods of forming integrated assemblies
Some embodiments include a method of forming an integrated assembly. A construction is formed to include a structure having an exposed surface, and to include an opening proximate the structure. An aperture extends into the opening. A first material is deposited to form a mass along the exposed surface of the structure. Particles are sputtered from the mass and across the aperture. The particles agglomerate to form a sealant material which traps a void within the opening.
1. A method of forming an integrated assembly, comprising:
forming a construction to include, along a cross-section, a conductive structure having a top surface, and a pair of opposing sidewall surfaces extending downwardly from the top surface; the construction also including insulative material over the top surface, and including panels along the sidewall surfaces; openings being between the sidewall surfaces and the panels;
forming a mass adjacent the insulative material; and
sputtering particles from the mass to form a sealant material which extends across the openings and traps voids within the openings.
2. The method of claim 1 further comprising treating the sealant material to fill any pinholes present in the sealant material.
3. The method of claim 2 wherein the insulative material is a first insulative material, and wherein the treating comprises deposition of a layer of a second insulative material over the sealant material.
4. The method of claim 1 wherein the mass comprises one or more elements selected from group 14 of the periodic table.
5. The method of claim 1 wherein the mass comprises silicon.
6. The method of claim 1 wherein the sealant material comprises silicon dioxide.
7. The method of claim 1 wherein the sputtering is conducted under oxidizing conditions.
8. A method of forming an integrated assembly, comprising:
forming a construction to include, along a cross-section, a pair of digit lines spaced from one another by an intervening region; each of the digit lines having a top surface, and a pair of opposing sidewall surfaces extending downwardly from the top surface; the construction including insulative structures over the top surfaces, and including rails along the sidewall surfaces; the rails comprising a sacrificial material sandwiched between a pair of panels; the construction including a conductive interconnect within the intervening region; the insulative structures comprising a first insulative material; the sacrificial material comprising silicon dioxide and the panels comprising silicon nitride;
removing the sacrificial material to leave openings between the panels;
forming masses over tops of the insulative structures;
sputtering particles from the masses to form a sealant material which extends across the openings and covers voids within the openings;
forming a second insulative material across the insulative structures, across the sealant material and across the conductive interconnect;
removing a portion of the second insulative material to expose a region of the conductive interconnect; and
coupling the exposed region of the conductive interconnect with a capacitor.
9. The method of claim 8 further comprising treating the sealant material to fill any pinholes present in the sealant material.
10. The method of claim 9 wherein the treating comprises deposition of a layer of a third insulative material over the sealant material.
11. The method of claim 10 wherein the third insulative material comprises a same composition as the sealant material.
12. The method of claim 11 wherein the third insulative material and the sealant material both comprise silicon dioxide.
13. The method of claim 10 wherein the third insulative material comprises a different composition than the sealant material.
14. The method of claim 13 wherein the third insulative material comprises silicon nitride, and wherein the sealant material comprises silicon dioxide.
15. The method of claim 8 wherein the mass comprises one or more elements selected from group 14 of the periodic table.
16. The method of claim 15 wherein the sealant material comprises silicon dioxide.