Optical detector device with patterned graphene layer and related methods
A method is for making an optical detector device. The method may include forming a reflector layer carried by a substrate, forming a first dielectric layer over the reflector layer, and forming a graphene layer over the first dielectric layer and having a perforated pattern therein.
1. A method for making an optical detector device, the method comprising:
forming a reflector layer carried by a substrate;
forming a first dielectric layer over the reflector layer;
forming a graphene layer over the first dielectric layer, the graphene layer having a perforated pattern therein, the perforated pattern comprising an array of openings, the array of openings comprising a plurality of rows and a plurality of columns; and
forming a second dielectric layer over the graphene layer and covering the array of openings.
2. The method of claim 1 wherein the array of openings comprises a square array of openings.
3. The method of claim 2 wherein each opening of the square array of openings is circle-shaped.
4. The method of claim 1 wherein the perforated pattern is symmetrical.
5. The method of claim 1 wherein the first dielectric layer comprises a polymer material.
6. The method of claim 1 wherein said graphene layer comprises a monolayer of graphene.
7. The method of claim 1 further comprising:
forming a first electrically conductive contact coupled to said second dielectric layer; and
forming a second electrically conductive contact coupled to said graphene layer.
8. The method of claim 1 wherein said reflector layer comprises gold material.
9. The method of claim 1 wherein said reflector layer has a thickness greater than a threshold thickness for optical opacity.
10. The method of claim 1 wherein the substrate comprises a glass material; and wherein the second dielectric layer comprises an ion gel material.
11. A method of operating an optical detector device comprising a substrate, a reflector layer carried by the substrate, a first dielectric layer over the reflector layer, and a graphene layer over the first dielectric layer and having a perforated pattern therein, the method comprising:
performing a direct absorption based upon a cavity coupling with the graphene layer with the perforated pattern, the perforated pattern comprising an array of openings with a plurality of rows and a plurality of columns, the optical detector device comprising a second dielectric layer over the graphene layer and covering the array of openings.
12. The method of claim 11 wherein the array of openings comprises a square array of openings.
13. The method of claim 12 wherein each opening of the square array of openings is circle-shaped.
14. The method of claim 11 wherein the perforated pattern is symmetrical.
15. The method of claim 11 wherein the first dielectric layer comprises a polymer material.
16. The method of claim 11 wherein the graphene layer comprises a monolayer of graphene.
17. The method of claim 11 wherein the optical detector device further comprises:
a first electrically conductive contact coupled to the second dielectric layer; and
a second electrically conductive contact coupled to the graphene layer.
18. The method of claim 11 wherein the reflector layer comprises gold material.
19. The method of claim 11 wherein the reflector layer has a thickness greater than a threshold thickness for optical opacity.
20. The method of claim 11 wherein the substrate comprises a glass material; and wherein the second dielectric layer comprises an ion gel material.