Semiconductor device and method
A representative method for manufacturing a semiconductor device (e.g., a fin field-effect transistor) includes the steps of forming a gate structure having a first lateral width, and forming a first via opening over the gate structure. The first via opening has a lowermost portion that exposes an uppermost surface of the gate structure. The lowermost portion of the first via opening has a second lateral width. A ratio of the second lateral width to the first lateral width is less than about 1.1. A source/drain (S/D) region is disposed laterally adjacent the gate structure. A contact feature is disposed over the S/D region. A second via opening extends to and exposes an uppermost surface of the contact feature. A bottommost portion of the second via opening is disposed above a topmost portion of the gate structure.
1. A semiconductor device comprising:
a gate structure including a first metal layer and a second metal layer over the first metal layer, wherein the first metal layer extends above the second metal layer;
a first dielectric material over the gate structure; and
a conductive contact disposed over the gate structure, the conductive contact extending through the first dielectric material to an upper surface and sidewall of the first metal layer.
2. The semiconductor device of claim 1 , further comprising a third metal layer interposed between the first metal layer and a gate spacer adjacent the gate structure.
3. The semiconductor device of claim 2 , wherein upper surfaces of the second metal layer and the third metal layer continuously tapers up as the upper surfaces of the second metal layer and the third metal layer extend towards the gate spacer.
4. The semiconductor device of claim 2 , wherein an upper surface of the second metal layer is completely covered by the conductive contact in a cross-sectional view.
5. The semiconductor device of claim 2 , wherein an upper surface of the first dielectric material is level with an upper surface of the gate spacer.
6. The semiconductor device of claim 2 , wherein an upper surface of the third metal layer is free of the conductive contact.
7. The semiconductor device of claim 2 , wherein an upper surface of the second metal layer is recess between and including 2 nm and 10 nm.
8. The semiconductor device of claim 2 , wherein the second metal layer comprises a void, the void being completely surrounded by the second metal layer.
9. A semiconductor device comprising:
a gate structure having a first lateral width, wherein the gate structure comprises a first metal layer and a second metal layer over the first metal layer, wherein the second metal layer extends above the first metal layer;
a first dielectric material over the gate structure; and
a conductive contact extending through the first dielectric material and physically contacting the first metal layer and the second metal layer, the conductive contact having a lower portion physically contacting an upper surface of the gate structure, the lower portion having a second lateral width, wherein the second lateral width is less than the first lateral width.
10. The semiconductor device of claim 9 , wherein an upper surface of the second metal layer is above an upper surface of the first metal layer a distance between and including 1 nm and 20 nm.
11. The semiconductor device of claim 9 , further comprising a third metal layer interposed between the first metal layer and a gate spacer adjacent the gate structure.
12. The semiconductor device of claim 11 , wherein the conductive contact covers a sidewall of the second metal layer in a cross-sectional view.
13. The semiconductor device of claim 11 , wherein an upper surface of the first metal layer and the third metal layer are flat.
14. The semiconductor device of claim 11 , wherein an upper surface of the first metal layer and the third metal layer collectively form a concave surface.
15. The semiconductor device of claim 11 , wherein an upper surface of the first metal layer is higher than an upper surface of the third metal layer.
16. A semiconductor device comprising:
a gate structure comprising a first metal layer and a second metal layer directly on the first metal layer, wherein the second metal layer is recessed below an upper surface of the first metal layer;
a first dielectric material over the gate structure; and
forming a conductive contact disposed over the gate structure, the conductive contact physically contacting an upper surface of the second metal layer and a sidewall of the first metal layer.
17. The semiconductor device of claim 16 , wherein the second metal layer comprises a void, the void being completely surrounded by the second metal layer.
18. The semiconductor device of claim 16 , further comprising a third metal layer interposed between the first metal layer and a gate spacer adjacent the gate structure.
19. The semiconductor device of claim 16 , wherein an entire surface of the second metal layer is covered by the conductive contact in a cross-sectional view.
20. The semiconductor device of claim 18 , wherein an upper surface of the third metal layer is curved.