Acoustic wave resonator, filter, and multiplexer
An acoustic wave resonator includes: a support substrate; a piezoelectric substrate located on the support substrate; a first amorphous layer that is in contact with the support substrate and is mainly composed of one or more constituent elements of the support substrate; a second amorphous layer that is in contact with the piezoelectric substrate and the first amorphous layer, is mainly composed of one or more constituent elements of the piezoelectric substrate, and is thinner than the first amorphous layer; and a pair of comb-shaped electrodes that is located on an opposite surface of the piezoelectric substrate from the support substrate, each of the pair of comb-shaped electrodes including electrode fingers.
1. An acoustic wave resonator comprising:
a support substrate;
a piezoelectric substrate located on the support substrate;
a first amorphous layer that is in contact with the support substrate and is mainly composed of one or more constituent elements of the support substrate;
a second amorphous layer that is in contact with the piezoelectric substrate and the first amorphous layer, is mainly composed of one or more constituent elements of the piezoelectric substrate, and is thinner than the first amorphous layer; and
a pair of comb-shaped electrodes that is located on an opposite surface of the piezoelectric substrate from the support substrate, each of the pair of comb-shaped electrodes including electrode fingers,
wherein
a thickness of the piezoelectric substrate is less than an average pitch of the electrode fingers of one of the pair of comb-shaped electrodes, and
a thickness of the second amorphous layer is equal to or less than 0.8 times a thickness of the first amorphous layer.
2. The acoustic wave resonator according to claim 1 , wherein
the piezoelectric substrate is a monocrystalline substrate, and
the support substrate is a monocrystalline substrate, a polycrystalline substrate, or a sintered body substrate.
3. The acoustic wave resonator according to claim 2 , wherein
the piezoelectric substrate is a lithium tantalite substrate or a lithium niobate substrate, and
the support substrate is a sapphire substrate, a spinel substrate, a silicon substrate, a crystal substrate, a quartz substrate, or an alumina substrate.
4. The acoustic wave resonator according to claim 3 , wherein
a total atomic concentration of an element other than oxygen among the one or more constituent elements of the support substrate in the first amorphous layer is higher than a total atomic concentration of an element other than oxygen among the one or more constituent elements of the piezoelectric substrate, and
a total atomic concentration of an element other than oxygen among the one or more constituent elements of the piezoelectric substrate in the second amorphous layer is higher than a total atomic concentration of an element other than oxygen among the one or more constituent elements of the support substrate.
5. The acoustic wave resonator according to claim 1 , wherein
the pair of comb-shaped electrodes excites an SH wave.
6. The acoustic wave resonator according to claim 1 , wherein
the second amorphous layer is equal to or less than 1 nm.
7. The acoustic wave resonator according to claim 6 , wherein
the second amorphous layer is equal to or greater than 0.1 nm.
8. The acoustic wave resonator according to claim 7 , wherein
the first amorphous layer is equal to or less than 5 nm and is equal or greater than 0.5 nm.
9. A filter comprising:
an acoustic wave resonator including:
a support substrate,
a piezoelectric substrate located on the support substrate,
a first amorphous layer that is in contact with the support substrate and is mainly composed of one or more constituent elements of the support substrate,
a second amorphous layer that is in contact with the piezoelectric substrate and the first amorphous layer, is mainly composed of one or more constituent elements of the piezoelectric substrate, and is thinner than the first amorphous layer, and
a pair of comb-shaped electrodes that is located on an opposite surface of the piezoelectric substrate from the support substrate, each of the pair of comb-shaped electrodes including electrode fingers,
wherein
a thickness of the piezoelectric substrate is less than an average pitch of the electrode fingers of one of the pair of comb-shaped electrodes, and
a thickness of the second amorphous layer is equal to or less than 0.8 times a thickness of the first amorphous layer.
10. A multiplexer comprising:
a filter including an acoustic wave resonator, wherein
the acoustic wave resonator includes:
a support substrate,
a piezoelectric substrate located on the support substrate,
a first amorphous layer that is in contact with the support substrate and is mainly composed of one or more constituent elements of the support substrate,
a second amorphous layer that is in contact with the piezoelectric substrate and the first amorphous layer, is mainly composed of one or more constituent elements of the piezoelectric substrate, and is thinner than the first amorphous layer, and
a pair of comb-shaped electrodes that is located on an opposite surface of the piezoelectric substrate from the support substrate, each of the pair of comb-shaped electrodes including electrode fingers,
wherein
a thickness of the piezoelectric substrate is less than an average pitch of the electrode fingers of one of the pair of comb-shaped electrodes, and
a thickness of the second amorphous layer is equal to or less than 0.8 times a thickness of the first amorphous layer.