Conductive interconnects suitable for utilization in integrated assemblies, and methods of forming conductive interconnects
Some embodiments include an integrated assembly having an insulative mass over a conductive base structure. A conductive interconnect extends through the insulative mass to an upper surface of the conductive base structure. The conductive interconnect includes a conductive liner extending around an outer lateral periphery of the interconnect. The conductive liner includes nitrogen in combination with a first metal. A container-shaped conductive structure is laterally surrounded by the conductive liner. The container-shaped conductive structure includes a second metal. A conductive plug is within the container-shaped conductive structure. Some embodiments include methods of forming conductive interconnects within integrated assemblies.
1. An integrated assembly, comprising:
an insulative mass over a conductive base structure; and
a conductive interconnect extending through the insulative mass to an upper surface of the conductive base structure, the conductive interconnect comprising:
a conductive liner extending around an outer lateral periphery of the conductive interconnect, the conductive liner comprising nitrogen in combination with a first metal;
a container-shaped conductive structure laterally surrounded by the conductive liner and comprising a second metal;
a conductive plug within the container-shaped conductive structure; and
a liner between the container-shaped conductive structure and the conductive plug.
2. The integrated assembly of claim 1 wherein the conductive liner comprises one or more of TaSiN, TaN, TiSiN, TiN, WN and WSiN, where the chemical formulas indicate components and not specific stoichiometries.
3. The integrated assembly of claim 1 wherein the first and second metals are the same as one another.
4. The integrated assembly of claim 3 wherein the first and second metals are tungsten.
5. The integrated assembly of claim 4 wherein the conductive plug comprises tungsten.
6. The integrated assembly of claim 1 wherein the first and second metals are different from one another.
7. The integrated assembly of claim 1 wherein a bottom surface of the container-shaped conductive structure directly contacts the upper surface of the conductive base structure.
8. The integrated assembly of claim 1 wherein the conductive base structure comprises tungsten or copper.
9. The integrated assembly of claim 1 wherein the conductive interconnect has a first side, and has a second side in opposing relation to the first side; and comprising, along a cross-section, a first set of memory cells of a memory array along the first side of the conductive interconnect, and a second set of memory cells of the memory array along the second side of the conductive interconnect; and wherein a sense/access line is above the memory cells of the first and second sets and is above the conductive interconnect; and wherein the sense/access line is electrically coupled with the memory cells of the first and second sets, and is electrically coupled with the conductive interconnect.
10. The integrated assembly of claim 9 wherein the memory cells comprise chalcogenide as programmable material.
11. The integrated assembly of claim 1 wherein the container-shaped conductive structure comprises a varying thickness along the conductive liner.
12. The integrated assembly of claim 1 wherein the container-shaped conductive structure comprises an increasing thickness along the conductive liner toward the conductive plug.
13. The integrated assembly of claim 1 wherein the liner comprises conductive material.
14. The integrated assembly of claim 1 wherein the liner comprises the same composition as the conductive liner.
15. The integrated assembly of claim 1 wherein the liner comprises a different composition as the conductive liner.
16. The integrated assembly of claim 1 wherein the liner comprises a thickness of less than or equal to about 10 Å.
17. The integrated assembly of claim 1 wherein the conductive liner does not extend from one side of the container-shaped conductive structure to an opposite side of the container-shaped conductive structure.
18. An integrated assembly, comprising:
an insulative mass over a conductive base structure; and
a conductive interconnect extending through the insulative mass to an upper surface of the conductive base structure, the conductive interconnect comprising:
a conductive liner extending around an outer lateral periphery of the conductive interconnect, the conductive liner comprising nitrogen in combination with a first metal;
a container-shaped conductive structure laterally surrounded by the conductive liner and comprising a second metal;
a conductive plug within the container-shaped conductive structure; and
wherein the conductive liner is a first conductive liner; wherein the container-shaped conductive structure is configured to comprise an upwardly-opening container; and further comprising a second conductive liner within the upwardly-opening container and narrowing the upwardly-opening container; the conductive plug being within the narrowed upwardly-opening container.
19. The integrated assembly of claim 18 wherein the second conductive liner comprises a same composition as the first conductive liner.
20. The integrated assembly of claim 18 wherein the second conductive liner comprises a different composition than the first conductive liner.
21. An integrated assembly, comprising:
an insulative mass over a conductive base structure; and
a conductive interconnect extending through the insulative mass to an upper surface of the conductive base structure, the conductive interconnect comprising:
a conductive liner extending around an outer lateral periphery of the conductive interconnect, the conductive liner comprising nitrogen in combination with a first metal;
a container-shaped conductive structure laterally surrounded by the conductive liner and comprising a second metal;
a conductive plug within the container-shaped conductive structure; and
wherein the conductive interconnect has a first side, and has a second side in opposing relation to the first side; and comprising, along a cross-section, a first set of memory cells of a memory array along the first side of the conductive interconnect, and a second set of memory cells of the memory array along the second side of the conductive interconnect; and
wherein a sense/access line is above the memory cells of the first and second sets and is above the conductive interconnect; and wherein the sense/access line is electrically coupled with the memory cells of the first and second sets, and is electrically coupled with the conductive interconnect.
22. The integrated assembly of claim 21 wherein the memory cells comprise chalcogenide as programmable material.
23. An integrated assembly, comprising:
an insulative mass over a conductive base structure; and
a conductive interconnect extending through the insulative mass to an upper surface of the conductive base structure, the conductive interconnect comprising:
a conductive liner extending around an outer lateral periphery of the conductive interconnect, the conductive liner comprising nitrogen in combination with a first metal;
a container-shaped conductive structure laterally surrounded by the conductive liner and comprising a second metal;
a conductive plug within the container-shaped conductive structure; and
wherein the container-shaped conductive structure comprises a varying thickness along the conductive liner.
24. An integrated assembly, comprising:
an insulative mass over a conductive base structure; and
a conductive interconnect extending through the insulative mass to an upper surface of the conductive base structure, the conductive interconnect comprising:
a conductive liner extending around an outer lateral periphery of the conductive interconnect, the conductive liner comprising nitrogen in combination with a first metal;
a container-shaped conductive structure laterally surrounded by the conductive liner and comprising a second metal;
a conductive plug within the container-shaped conductive structure; and
wherein the container-shaped conductive structure comprises an increasing thickness along the conductive liner toward the conductive plug.
25. An integrated assembly, comprising:
an insulative mass over a conductive base structure; and
a conductive interconnect extending through the insulative mass to an upper surface of the conductive base structure, the conductive interconnect comprising:
a conductive liner extending around an outer lateral periphery of the conductive interconnect, the conductive liner comprising nitrogen in combination with a first metal;
a container-shaped conductive structure laterally surrounded by the conductive liner and comprising a second metal;
a conductive plug within the container-shaped conductive structure; and
wherein the conductive liner does not extend from one side of the container-shaped conductive structure to an opposite side of the container-shaped conductive structure.