Method for producing an optoelectronic semiconductor chip and optoelectronic semiconductor chip
A semiconductor chip and a method for producing a semiconductor chip are disclosed. In an embodiment an electronic semiconductor chip includes a growth substrate with a growth surface, which is formed by a planar region having a plurality of three-dimensional surface structures on the planar region, a nucleation layer composed of oxygen-containing AlN directly disposed on the growth surface and a nitride-based semiconductor layer sequence disposed on the nucleation layer, wherein the semiconductor layer sequence is selectively grown from the planar region such that a growth of the semiconductor layer sequence on surfaces of the three-dimensional surface structures is reduced or non-existent compared to a growth on the planar region, and wherein a selectivity of the growth of the semiconductor layer sequence on the planar region is targetedly adjusted by an oxygen content of the nucleation layer.
1. An electronic semiconductor chip comprising:
a growth substrate with a growth surface, which is formed by a planar region having a plurality of three-dimensional surface structures on the planar region;
a nucleation layer composed of oxygen-containing AlN directly disposed on the growth surface; and
a nitride-based semiconductor layer sequence disposed on the nucleation layer,
wherein the semiconductor layer sequence is selectively grown from the planar region such that a growth of the semiconductor layer sequence on surfaces of the three-dimensional surface structures is reduced or non-existent compared to a growth on the planar region,
wherein the nucleation layer is located on both the planar region and the three-dimensional surface structures of the growth surface,
wherein a selectivity of the growth of the semiconductor layer sequence on the planar region is targetedly adjusted by an oxygen content of the nucleation layer, and
wherein the oxygen content of the nucleation layer is more than 10 19 cm −3 .
2. The electronic semiconductor chip according to claim 1 , wherein the three-dimensional surface structures are formed by grooves projecting into the growth substrate.
3. The electronic semiconductor chip according to claim 2 , wherein the grooves are conical grooves or pyramidal grooves.
4. The electronic semiconductor chip according to claim 2 , wherein the grooves have a round cross-section or a polygonal cross-section when the growth surface is viewed from above.
5. The electronic semiconductor chip according to claim 1 , wherein the growth surface is terminated with oxygen.
6. The electronic semiconductor chip according to claim 1 , wherein the growth substrate comprises aluminum oxide.
7. The electronic semiconductor chip according to claim 1 , wherein the electronic semiconductor chip is a light-emitting diode or light-detecting diode.
8. An electronic semiconductor chip comprising:
a nucleation layer composed of oxygen-containing AlN; and
a nitride-based semiconductor layer sequence disposed on the nucleation layer,
wherein the semiconductor layer sequence with the nucleation layer comprises three-dimensional surface structures and a planar region between the three-dimensional surface structures,
wherein the three-dimensional surface structures and the planar region are arranged at a side of the semiconductor layer sequence facing the nucleation layer,
wherein the nucleation layer covers both the planar region and the three-dimensional surface structures,
wherein the three-dimensional surface structures comprise elevations extending away from the semiconductor layer sequence and extending from the planar regions, and
wherein an oxygen content of the nucleation layer is more than 10 19 cm −3 .
9. The electronic semiconductor chip according to claim 8 , wherein the semiconductor layer sequence is selectively grown from the planar region such that a growth of the semiconductor layer sequence on surfaces of the three-dimensional surface structures is reduced or non-existent compared to a growth on the planar region.
10. The electronic semiconductor chip according to claim 8 , wherein a selectivity of a growth of the semiconductor layer sequence from the planar region is targetedly adjusted by the oxygen content of the nucleation layer.
11. The electronic semiconductor chip according to claim 8 , wherein the elevations have a round cross-section or a polygonal cross-section.
12. The electronic semiconductor chip according to claim 8 , wherein the elevations are conical elevations.
13. The electronic semiconductor chip according to claim 8 , wherein the elevations are pyramidal elevations.
14. The electronic semiconductor chip according to claim 8 , wherein the electronic semiconductor chip is a light-emitting diode.
15. The electronic semiconductor chip according to claim 8 , wherein the electronic semiconductor chip is a light-detecting diode.
16. The electronic semiconductor chip according to claim 2 , wherein the grooves are conical grooves.
17. The electronic semiconductor chip according to claim 2 , wherein the grooves are pyramidal grooves.