IP Library › Granted Patent US 10,964,837
Granted Patent B2
US 10,964,837 · App. 16/387,011 · Granted Mar 30, 2021

Photo detector systems and methods of operating same

Inventors: Denis Sallin (Echandens, CH); Maxim Gureev (Lausanne, CH); Serguei Okhonin (St-Sulpice, CH)
Assignee: ACTLIGHT SA
H01L31/1136H01L31/022408H01L31/035281H01L31/1804
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Quick Facts
Patent No.
US 10,964,837
App. No.
16/387,011
Granted
Mar 30, 2021
Kind
B2
Abstract

According to embodiments of the present disclosure, a dynamic photodiode may include a substrate including a major surface; a hedge formation extruding perpendicularly from the major surface; a first resettable region disposed on a top surface the hedge formation; a second resettable region disposed on the top surface of the hedge formation; a first doped region disposed on the top surface of the hedge formation between the first resettable region and the second resettable region, the first doped region including a first contact configured to receive a first voltage; and a second doped region disposed on a top surface of the hedge formation, the second doped region including a second contact configured to receive a second voltage. Exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

Claims (80)

1. A dynamic photodiode, comprising:

a substrate including a first surface opposite a second surface;

a pillar formation extruding perpendicularly from the first surface;

a first doped region disposed on the first surface or the second surface, the first doped region including a first contact configured to receive a first voltage;

a second doped region disposed on a top surface of the pillar formation, the second doped region including a second contact configured to receive a second voltage;

a first gate disposed on a lateral surface of the pillar formation, the first gate including a first gate contact configured to receive a gate voltage; and

a second gate disposed on another lateral surface of the pillar formation, the second gate including a second gate contact configured to receive the gate voltage or another gate voltage, wherein:

exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

2. The dynamic photodiode of claim 1 , further comprising a third doped region disposed on the first surface, the third doped region including a third contact that is grounded.

3. A dynamic photodiode, comprising:

a substrate including a major surface;

a pillar formation extruding perpendicularly from the major surface;

a first doped region disposed on a bottom surface of the pillar formation, the first doped region including a first contact configured to receive a first voltage;

a second doped region disposed on a top surface of the pillar formation, the second doped region including a second contact configured to receive a second voltage;

a first gate disposed proximate to the first doped region on a lateral surface of the pillar formation, the first gate including a first gate contact configured to receive a first gate voltage;

a second gate disposed proximate to the first doped region on another lateral surface of the pillar formation, the second gate including a second gate contact configured to receive the first gate voltage or a second gate voltage;

a third gate disposed proximate to the second doped region on the lateral surface of the pillar formation, the third gate including a third gate contact configured to receive a third gate voltage; and

a fourth gate disposed proximate to the second doped region on the another lateral surface of the pillar formation, the fourth gate including a fourth gate contact configured to receive the third gate voltage or a fourth gate voltage, wherein:

exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

4. The dynamic photodiode of claim 3 , further comprising a third doped region disposed on the major surface, the third doped region including a third contact that is grounded.

5. A dynamic photodiode, comprising:

a substrate including a major surface;

a first pillar formation extruding perpendicularly from the major surface;

a second pillar formation extruding perpendicularly from the major surface;

a first doped region disposed on a top surface of the first pillar formation, the first doped region including a first contact configured to receive a first voltage;

a second doped region disposed on a top surface of the second pillar formation, the second doped region including a second contact configured to receive a second voltage;

a first gate disposed on a lateral surface of the first pillar formation, the first gate including a first gate contact configured to receive a first gate voltage;

a second gate disposed on another lateral surface of the first pillar formation, the second gate including a second gate contact configured to receive the first gate voltage or a second gate voltage;

a third gate disposed on the lateral surface of the second pillar formation, the third gate including a third gate contact configured to receive a third gate voltage; and

a fourth gate disposed on the another lateral surface of the second pillar formation, the fourth gate including a fourth gate contact configured to receive the third gate voltage or a fourth gate voltage, wherein:

exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

6. The dynamic photodiode of claim 5 , further comprising a third doped region disposed on the major surface, the third doped region including a third contact that is grounded.

7. A dynamic photodiode, comprising:

a substrate including a major surface;

a first hedge formation extruding perpendicularly from the major surface;

a second hedge formation extruding perpendicularly from the major surface and substantially parallel to the first hedge formation;

a first gate disposed on a top surface and lateral surfaces of the first hedge formation, the first gate including a first gate contact configured to receive a first gate voltage;

a second gate disposed on the top surface and the lateral surfaces of the first hedge formation, the second gate including a second gate contact configured to receive the first gate voltage or a second gate voltage;

a first doped region disposed on the top surface of the first hedge formation between the first gate and the second gate, the first doped region including a first contact configured to receive a first voltage; and

a second doped region disposed on a top surface of the second hedge formation, the second doped region including a second contact configured to receive a second voltage, wherein:

exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

8. The dynamic photodiode of claim 7 , further comprising:

a third gate disposed on the top surface and lateral surfaces of the second hedge formation, the third gate including a third gate contact configured to receive a third gate voltage; and

a fourth gate disposed on the top surface and the lateral surfaces of the second hedge formation, the fourth gate including a fourth gate contact configured to receive the third gate voltage or a fourth gate voltage, wherein:

the second doped region is disposed between the third gate and the fourth gate.

9. A dynamic photodiode, comprising:

a substrate including a major surface;

a first hedge formation extruding perpendicularly from the major surface;

a second hedge formation extruding perpendicularly from the major surface and substantially parallel to the first hedge formation;

a first resettable region disposed on a top surface the first hedge formation;

a second resettable region disposed on the top surface of the first hedge formation;

a first doped region disposed on the top surface of the first hedge formation between the first resettable region and the second resettable region, the first doped region including a first contact configured to receive a first voltage; and

a second doped region disposed on a top surface of the second hedge formation, the second doped region including a second contact configured to receive a second voltage, wherein:

exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

10. The dynamic photodiode of claim 9 , wherein:

the first resettable region is an n+ doped region and includes a first resettable contact configured to receive a reset voltage; and

the second resettable region is an n+ doped region and includes a second resettable contact configured to receive the reset voltage or another reset voltage.

11. A dynamic photodiode, comprising:

a substrate including a major surface;

a hedge formation extruding perpendicularly from the major surface;

a first resettable region disposed on a top surface the hedge formation;

a second resettable region disposed on the top surface of the hedge formation;

a first doped region disposed on the top surface of the hedge formation between the first resettable region and the second resettable region, the first doped region including a first contact configured to receive a first voltage; and

a second doped region disposed on a top surface of the hedge formation, the second doped region including a second contact configured to receive a second voltage, wherein:

exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

12. The dynamic photodiode of claim 11 , wherein:

the first resettable region is an n+ doped region and includes a first resettable contact configured to receive a reset voltage; and

the second resettable region is an n+ doped region and includes a second resettable contact configured to receive the reset voltage or another reset voltage.

13. A dynamic photodiode, comprising:

a substrate including a major surface;

a hedge formation extruding perpendicularly from the major surface;

a first gate disposed on a top surface and lateral surfaces of the hedge formation, the first gate including a first gate contact configured to receive a first gate voltage;

a second gate disposed on the top surface and the lateral surfaces of the hedge formation, the second gate including a second gate contact configured to receive the first gate voltage or a second gate voltage;

a first doped region disposed on the top surface of the hedge formation between the first gate and the second gate, the first doped region including a first contact configured to receive a first voltage; and

a second doped region disposed on a top surface of the hedge formation, the second doped region including a second contact configured to receive a second voltage, wherein:

exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

14. The dynamic photodiode of claim 13 , further comprising:

a third gate disposed on the top surface and lateral surfaces of the hedge formation, the third gate including a third gate contact configured to receive a third gate voltage; and

a fourth gate disposed on the top surface and the lateral surfaces of the hedge formation, the fourth gate including a fourth gate contact configured to receive the third gate voltage or a fourth gate voltage, wherein:

the second doped region is disposed between the third gate and the fourth gate.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2019
From: SALLIN, DENIS; GUREEV, MAXIM; OKHONIN, SERGUEI
To: ACTLIGHT SA
Reel/Frame 049143/0392 →
Continuity (4)
Continuation In Part 15461645 · Mar 17, 2017
Continuation In Part 14149928 · Mar 3, 2014
Provisional Application 61786781 · Mar 15, 2013
Related Publication 20190252570A1 · Aug 15, 2019
Cited By (2)
US 12,474,453 US 12,598,374