Crucible and SiC single crystal growth apparatus
The present invention provides a crucible and a SiC single crystal growth apparatus capable of improving the efficiency of using source materials. The crucible includes a lid and a container. The container includes a bottom facing the lid. The bottom includes a recess which is recessed towards the lid.
1. A SiC single crystal growth apparatus comprising a crucible and an outer heating device, the crucible comprising:
a lid,
a container,
wherein the container comprises a closed bottom which faces the lid, and
the bottom comprises an annular recess in plan view,
the recess opens at the bottom of the container and extends towards the lid, and
the recess is in a concentric position from a center of the bottom in plan view,
the SiC single crystal growth apparatus further comprising an inner heating device provided in the recess of the crucible, and a lift configured to move the inner heating device up and down in a height direction of the crucible,
wherein the outer heating device is provided at an outer peripheral side of the crucible, and
wherein a thickness of the inner heating device in the height direction is smaller than a depth of the recess.
2. The SiC single crystal growth apparatus according to claim 1 ,
wherein the inner heating device uses a resistance heating method.
3. The SiC single crystal growth apparatus according to claim 1 ,
wherein the lid has a first surface facing the bottom, and a seed crystal is placed on the first surface.
4. The SiC single crystal growth apparatus according to claim 1 ,
wherein the inner heating device uses an induction heating method.
5. The SiC single crystal growth apparatus according to claim 4 ,
wherein the inner heating device has a high frequency generation source.
6. The SiC single crystal growth apparatus according to claim 5 ,
wherein while a SiC single crystal is grown, the high frequency generation source is covered with a heat insulating material.
7. The SiC single crystal growth apparatus according to claim 1 ,
wherein the inner heating device has an annular body in plan view and has protrusions extending from the annular body towards the lid at concentric positions from a center in plan view.
8. The SiC single crystal growth apparatus according to claim 1 ,
wherein a diameter of a single crystal growing on a seed crystal is 6 inches or more, and
in order to sublimate a raw material, the raw material is heated at a temperature exceeding 2000° C.