IP Library Granted Patent US 11,041,257
Granted Patent B2
US 11,041,257 · App. 16/391,566 · Granted Jun 22, 2021

Shielding member including a plurality of shielding plates arranged without gaps therebetween in plan view and apparatus for growing single crystals

Inventors: Yoshiteru Hosaka (Hikone, JP); Yohei Fujikawa (Hikone, JP)
Assignee: SHOWA DENKO K.K.
C30B35/002C30B23/066C30B29/36
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Quick Facts
Patent No.
US 11,041,257
App. No.
16/391,566
Granted
Jun 22, 2021
Kind
B2
Abstract

A shielding member includes a plurality of shielding plates, in which the plurality of shielding plates are arranged without gaps therebetween in a plan view from a crystal installation part, and the shielding member is disposed between a source material accommodation part and the crystal installation part, in an apparatus for growing single crystals, wherein the apparatus includes a container for crystal growth that has the source material accommodation part at an inner bottom part, and has the crystal installation part that faces the source material accommodation part, and includes a heating part that is configured to heat the container for crystal growth, in which a single crystal of the source material is grown on a crystal installed in the crystal installation part by subliming the source material from the source material accommodation part.

Claims (35)

1. A shielding member, comprising:

a plurality of shielding plates,

wherein the plurality of shielding plates are arranged without gaps therebetween in a plan view from a crystal installation part, and

wherein the shielding member is disposed between a source material accommodation part and the crystal installation part, in an apparatus for growing single crystals,

the apparatus for growing single crystals comprising:

a container for crystal growth that includes the source material accommodation part at an inner bottom part, and the crystal installation part that faces the source material accommodation part, and

a heating part that is configured to heat the container for crystal growth,

in which a single crystal of a source material is grown on a crystal installed in the crystal installation part by subliming the source material from the source material accommodation part,

adjacent surfaces of shielding plates which are adjacent to each other among the plurality of shielding plates are inclined with respect to a direction of a vertical line in which the vertical line is dropped from the crystal installation part to the source material accommodation part, and

gaps located between the shielding plates adjacent to each other are inclined with respect to the direction of the vertical line.

2. The shielding member according to claim 1 , further comprising a connection part that connects together the plurality of shielding plates and a support part that supports the connection part.

3. The shielding member according to claim 2 , wherein the connection part is located at a center of the source material accommodation part in a plan view.

4. A shielding member, comprising:

a plurality of shielding plates,

wherein the plurality of shielding plates are arranged without gaps there between in a plan view from a crystal installation part, and

wherein the shielding member is disposed between a source material accommodation part and the crystal installation part, in an apparatus for growing single crystals,

the apparatus for growing single crystals comprising:

a container for crystal growth that includes the source material accommodation part at an inner bottom part, and the crystal installation part that faces the source material accommodation part, and

a heating part that is configured to heat the container for crystal growth,

in which a single crystal of a source material is grown on a crystal installed in the crystal installation part by subliming the source material from the source material accommodation part,

wherein surfaces, which are on a side of the crystal installation part, of the plurality of shielding plates are located in the same plane.

5. An apparatus for growing single crystals, comprising the shielding member according to claim 1 .

6. The apparatus for growing single crystals according to claim 5 , further comprising a connection part that connects the plurality of shielding plates and a support part that supports the connection part.

7. The apparatus for growing single crystals according to claim 6 , wherein the connection part is located at a center of the source material accommodation part in a plan view.

8. The shielding member according to claim 4 , further comprising a connection part that connects together the plurality of shielding plates and a support part that supports the connection part.

9. The shielding member according to claim 8 , wherein the connection part is boated at a center of the source material accommodation part in a plan view.

10. The shielding member according to claim 4 ,

wherein adjacent surfaces of shielding plates which are adjacent to each other among the plurality of shielding plates are bent or curved, and

gaps located between the shielding plates adjacent to each other are bent or curved.

11. An apparatus for growing single crystals, comprising the shielding member according to claim 6 .

12. The apparatus for growing single crystals according to claim 11 , further comprising a connection part that connects the plurality of shielding plates and a support part that supports the connection part.

13. The apparatus for growing single crystals according to claim 12 , wherein the connection part is located at a center of the source material accommodation part in a plan view.

14. The apparatus for growing single crystals according to claim 11 ,

wherein adjacent surfaces of shielding plates which are adjacent to each other among the plurality of shielding plates are bent or curved, and

gaps located between the shielding plates adjacent to each other are bent or curved.

Assignments (3)
CHANGE OF ADDRESS Recorded Feb 14, 2024
From: RESONAC CORPORATION
To: RESONAC CORPORATION
Reel/Frame 066599/0037 →
CHANGE OF NAME Recorded Jun 23, 2023
From: SHOWA DENKO K.K.
To: RESONAC CORPORATION
Reel/Frame 064082/0513 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 23, 2019
From: HOSAKA, YOSHITERU; FUJIKAWA, YOHEI
To: SHOWA DENKO K.K.
Reel/Frame 048970/0053 →
Priority Claims (1)
JP JP2018-088247 · May 1, 2018 · national
Continuity (1)
Related Publication 20190338444A1 · Nov 7, 2019