System for and method of manufacture using multimodal analysis
The disclosed embodiments include systems and methods of manufacturing a product. The system may include a non-transitory computer readable medium comprising computer readable program code for performing the method. The method may include manufacturing batches of the product according to steps of a process flow, determining output data for each batch, sequencing the batches by output data, determining a plurality of modes of output data based on grouping the batches, identifying a detrimental factor to output data in a process flow step based on a correlation between the process flow step and a mode of the plurality of modes, and correcting the detrimental factor.
1. A non-transitory computer readable medium comprising computer readable program code for:
determining a yield loss for each of a plurality of batches of a product manufactured according to steps of a process flow;
categorizing at least some of the plurality of batches into at least one bin based on a type of the yield loss;
sequencing the batches in the at least one bin by yield loss;
determining a plurality of modes of yield loss of the batches in the bin based on grouping the batches in the bin; and
identifying a detrimental factor in a process flow step causing the yield loss of the batches in the bin based on a mode of the batches in the bin.
2. The computer readable medium of claim 1 further comprising computer readable program code for correcting the detrimental factor.
3. The computer readable medium of claim 2 , wherein correcting the detrimental factor comprises eliminating, revising, altering, correcting a tool subset in the process flow, or any combination thereof.
4. The computer readable medium of claim 1 further comprising computer readable program code for organizing the product into the batches.
5. The computer readable medium of claim 1 , wherein the product comprises a semiconductor wafer or a semiconductor wafer comprising a plurality of integrated circuits.
6. The computer readable medium of claim 1 , wherein the product comprises an electrical component, an automotive control circuit, a chemical product, or any combination thereof.
7. The computer readable medium of claim 1 , wherein sequencing the batches by output data comprises sequencing the batches from low yield loss to high yield loss.
8. The computer readable medium of claim 1 , wherein determining a plurality of modes comprises grouping the batches according to the percentage of yield loss.
9. The computer readable medium of claim 1 , wherein identifying the detrimental factor comprises identifying tool subsets used at a specific step in the process flow.
10. A method of manufacturing a product, comprising:
manufacturing batches of the product according to steps of a process flow;
determining output data for each batch;
sequencing the batches by output data;
determining a plurality of modes of output data based on grouping the batches;
identifying a detrimental factor to output data in a process flow step based on a correlation between the process flow step and a mode of the plurality of modes; and
correcting the detrimental factor.
11. The method of claim 10 , wherein correcting the detrimental factor comprises eliminating, revising, altering, correcting, or any combination thereof a tool subset in the process flow.
12. The method of claim 10 , comprising organizing the product into the batches.
13. The method of claim 10 , wherein sequencing the batches by output data comprises sequencing the batches from low yield loss to high yield loss.
14. The method of claim 10 , wherein identifying the detrimental factor comprises identifying tool subsets used at a specific step in the process flow.
15. A system for manufacturing a product, comprising:
manufacturing operations for manufacturing a product in batches according to a process flow; and
a processor comprising instructions for:
determining output data for each batch;
sequencing the batches by output data;
determining a plurality of modes of output data based on grouping the batches; and
identifying a detrimental factor to output data in one of the manufacturing operations based on a correlation between the process flow step and a mode of the plurality of modes.
16. The system of claim 10 , wherein the identified detrimental factor is correctable.
17. The system of claim 10 , wherein the product comprises a semiconductor wafer, a semiconductor wafer comprising a plurality of integrated circuits, an electrical component, an automotive vehicle, a chemical product, a device, or any combination thereof.
18. The system of claim 15 , wherein the instructions for identifying the detrimental factor comprise instructions for identifying tool subsets used at a specific step in the process flow.
19. The system of claim 15 , wherein the instructions for determining a plurality of modes comprise instructions for grouping the batches according to the percentage of yield loss.
20. The system of claim 15 , wherein the instructions for sequencing the batches by output data comprise instructions for sequencing the batches from low yield loss to high yield loss.