Magnetic tunnel junction element with Ru hard mask for use in magnetic random-access memory
A magnetic memory element having a Ru hard mask layer. The use of Ru advantageously allows for closer spacing of adjacent magnetic memory elements leading to increased data density. In addition, the use of Ru as a hard mask reduces parasitic electrical resistance by virtue of the fact that Ru does not oxidize in ordinary manufacturing environments. The magnetic memory element can be formed by depositing a plurality of memory element layers, depositing a Ru hard mask layer, depositing a RIEable layer over the Ru hard mask layer, and forming a photoresist mask over the hard mask layer. A reactive ion etching can be performed to transfer the image of the photoresist mask onto the RIEable layer to form a RIEable mask. An ion etching can then be performed to transfer the image of the RIAable mask onto the underlying Ru hard mask and underlying memory element layers.
1. A magnetic memory structure, comprising:
a tunnel junction structure including a magnetic free layer, a magnetic reference layer under the magnetic free layer, and a non-magnetic, electrically insulating barrier layer below the magnetic free layer and above the magnetic reference layer, wherein the magnetic reference layer is wider than the insulating barrier layer and the magnetic free layer;
a capping layer formed over the magnetic free layer;
a Ru hard mask layer formed on the capping layer; and
a non-magnetic, dielectric isolation layer deposited above the magnetic reference layer and surrounding the Ru hard mask layer, the capping layer, the magnetic free layer, and the insulating barrier layer.
2. The magnetic memory structure as in claim 1 , wherein the capping layer consists essentially of Ta.
3. The magnetic memory structure as in claim 1 , wherein the tunnel junction structure and the Ru hard mask layer are part of a common pillar structure.
4. The magnetic memory structure as in claim 1 , further comprising an electrically conductive electrode formed over the Ru hard mask structure.
5. The magnetic memory structure as in claim 1 , wherein the magnetic reference layer has a magnetization that is fixed in a magnetic state.
6. The magnetic memory structure as in claim 5 , wherein the non-magnetic, electrically insulating barrier layer comprises magnesium oxide.
7. The magnetic memory structure as in claim 1 , further comprising first and second electrodes, wherein the tunnel junction structure and the Ru hard mask layer are located between the first and second electrodes.
8. A magnetic memory structure, comprising:
a tunnel junction structure including a magnetic free layer, a magnetic reference layer under the magnetic free layer, and a non-magnetic, electrically insulating barrier layer below the magnetic free layer and above the magnetic reference layer, wherein the magnetic reference layer is wider than the insulating barrier layer and the magnetic free layer;
a Ru hard mask layer formed over the tunnel junction structure; and
a non-magnetic, dielectric isolation layer deposited above the magnetic reference layer and surrounding the Ru hard mask layer, the magnetic free layer, and the insulating barrier layer,
wherein the Ru hard mask layer is a capping layer formed on the magnetic free layer.